6
6
OPERATION
6.1
Overview
6.1.1
Introduction : Operation Modes
6.2
Startup Preparation
6.2.1
Start-up Preparation Sequence in LOCAL Mode
6.2.2
Start-up Preparation Sequence in REMOTE-control Connector
6.2.3
Start-up Preparation Sequence in Other Communication Means
6.3
Start-up
6.3.1
Start-up Sequence in LOCAL Mode
6.3.2
Start-up Sequence in REMOTE-control Connector
6.3.3
Start-up Sequence in Other Communication Means
6.4
Shutting Down
6.4.1
Preparations Prior to Shutting Down Operation
6.4.2
Shutting Down Sequence in LOCAL Mode
6.4.3
Shutting Down Sequence in REMOTE-control Connector
6.4.4
Shutting Down Sequence in Other Communication Means
6.5
Variable Speed Operation
6.4.1
Preparations Prior to Shutting Down Operation
6.4.2
Shutting Down Sequence in LOCAL Mode
6.4.3
Shutting Down Sequence in REMOTE-control Connector
6.4.4
Shutting Down Sequence in Other Communication Means
6.6
Software Operation
6.7
Remote-control Connector
6.7.1
Specification
6.7.2
Pin Assignment
6.7.3
Connector
6.8
Communication Specifications
6.8.1
RS-232C
6.8.2
RS-485
6.8.3
Connector
Содержание UTM2300 Series
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Страница 20: ...6 1 1 2 Descriptions This page is intentionally left blank...
Страница 21: ...2 2IDENTIFICATION AND FUNCTION 2 1 Pump Main Unit 2 2 Control Panel 2 3 External I F Panel...
Страница 25: ...3 3CONSTRUCTION AND PRINCIPLE 3 1 Pump Construction 3 2 Principle of Turbo Molecular Pumping 3 3 Controller...
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Страница 73: ...7 7GAS PURGE...
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Страница 95: ...10 10WARRANTY CLAUSES...
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