Ulvac PVD-180, Инструкция по эксплуатации

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SK00-4167-DI-002-07
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2-3 Oil Leak Check
The Pump system needs repair if occurred any oil leak from the Shaft sealing or Pump unit. Type
of the seals and O-rings are listed at the end of this document. Please contact the Service Center
close to you for purchase and repair.
2-4 Checking Gas Ballast Function
When used the Gas ballast function, the valve or in the introduction passage inside the Pump may
be stuck in the dust. Replacement parts and repair support at the local service center.
2-5 Checking Metal Mesh at the Suction Inlet
The Suction inlet might be clogged by the dust contained in the gas breathed in from the Vacuum
chamber and thus the Pump performance might be impaired.
If there is the metal mesh is dirty, please wash that.
Further it is anticipated that any welding scale drops off in the pipe particularly at the beginning of
the system start. Be fully cautious.
2-6 Checking Noise and Abnormal Vibration
1) Check whether bolts and nuts and the like fixing the Pump are loose or not.
2) Check whether pipes connected to the inlet/outlet are loose or not.
3) Check and ensure that there is no leakage from the piping and valves.
4) Check whether the tension of the belt is right or not.
Should the condition was not recovered after having checked points indicated there, please contact
the closest Service Center.
2-7 Checking Oil Mist Trap (option)
To use the Oil mist trap, be cautious not to have clog of the filter element in the trap. Too much
clog would prevent the exhaust gas from passing through the filter element, raise the pressure inside
the Pump unit and might result in breaking it. Replace the new Oil mist trap.