Ulvac PVD-180, Инструкция по эксплуатации

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SK00-4167-DI-002-07
10
Ⅱ
Preparation
1. Inspection
When unpacking, check the following items,
1) Is the pump received of the exact model you have ordered?
2) Are the complete accessories contained?
2-1) In case you have ordered a pump without motor, following items should be contained in the
pack; [Pump, Pump -base, V-belt, V-belt cover, Motor-pulley, Fitting bolts of motor and Pump
oil]
2- 2) In case you have ordered a pump with motor, following items should be contained in the pack;
[Pump, Pump-base, V-belt, V-belt cover, Motor-pulley, Pump oil and Motor]
3) Visually inspect if there is any damage to the pump and the parts caused by transportation.
4) Check for any looseness of screws or nuts or for any disconnection of parts.
Note: Should you have noticed any troubles or damages with the pump or its accessories, please
contact our local agency or directly to ULVAC International Department.
2. Mounting
Please set the pump horizontally on a rigid floor. The PVD pump is almost free from vibration during
operation and has no need of anchor bolts in mounting. The base of the pump should be, however,
installed reasonably flat to avoid possible rattling of the pump.
The use of anchor bolts or other fixing means is recommendable for a long time inattended running
or for running on an unstable floor. Excessive dust, acid fume, solvent vapor etc. should be avoided in
the environment.
3. Lubrication
1)
Remove the outlet-cap or oil mist trap. [Fig.10] and make sure that oil drain plug is closed.
2) Fill the rotary vacuum pump oil specified by ULVOIL R-72 until the oil can be observed at the oil
level window attached to a side of the pump [Fig.10].
The optimum level is at 5 mm above the center line of the window glass during the running of
the pump. Level will change depending on suction pressure. In most cases oil is added after
operating the pump for a short while.
Note: If the amount of filled oil is by far no appropriate, the performance of the pump will not be in a
satisfactory range.
Fig. 10 Oil filling