Ulvac PVD-180, Инструкция по эксплуатации

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SK00-4167-DI-002-07
5
2
．
Performance specifications
Table 3
Performance specifications
Type
Description
PVD-180
PVD-180B *2
PVD-360
PVD-360B *2
Designed pumping speed
m 3 /hr （ L/min ）
50Hz 9 （ 155 ） 19 （ 310 ）
60Hz 11
（
186
）
22
（
372
）
Ultimate pressure *1
Pa
GV Closed 0.67
GV Opened 6.7
Motor kW (Number of Poles) 0.4 (4) 0.75 (4)
Pump revolution
rpm
50Hz 500
60Hz 600
Maximum water vapor capacity g/hr 100
Oil ULVOIL R-72
Oil capacity
L
Standard 0.3 0.5
Z Specifications 1.5 1.7
Cooling method Air cooled
Inlet tube (O.D.
×
I.D.)
φ
28
×φ
19
φ
34
×φ
27
Outlet cap mounting screw G3/4 (PF3/4) G1 (PF1)
Weight (without motor) kg 33.5 43
External dimensions WxDxH mm 238
×
470
×
321 273
×
500
×
321
Recommended oil mist trap
（
Optional
）
TMX-1
Options
Oil mist trap, RF, explosion-resistant motor
Special application( Spec. K, H and Z )
*
1
Measured with a Pirani gauge. (Approx. 6.7X10 -2 Pa when measured with a McLeod vacuum gauge.)
*
2
The pump of this type, PVD-180B and 360B have following specific features in comparison with the
standard type, PVD-180, -360.
1) The pump [Type: PVD-180B or 360B] has a solenoid valve called Vac. Lock Valve (means Anti
Suck Back), when the pump stops the valve shuts off incoming oil and air and keeps a good vacuum
for a long period of time.
2)While the pump is running, the valve is open and appropriate amount of oil is supplied into the cylinder.
Please note the contents of "
Ⅱ -4 Electrical connections" and " Ⅲ Operation" for the running of PVD-
180B or PVD-360B.
Recommended type of oil:
(1) ULVOIL R-72 (standard oil)
(2) ULVOIL R-42 (For cold district in winter. In the case of ambient temperature 4~10
℃ )