Ulvac PVD-180, Инструкция по эксплуатации

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SK00-4167-DI-002-07
27
Trouble Causes Processing Method
Unusual
sounds
make.
1 Motor rotation direction is reverse.
Do the connection again to correct the
rotation direction.
2
The oil is not supplied by the
specified volume.
Control the oil level.
Supply the oil by the specified volume.
Conduct the overhaul.
(Replacement of the Pump part)
3
Foreign matter has entered the
Pump.
Conduct the overhaul.
(Clean the Pump to eliminate foreign
matter)
4
The oil is not circulating.
a. Oil pit of the Cover or the like is
clogged.
b. Oil distributor valve has a trouble.
Conduct the overhaul.
a. Clean the oil pit.
b. Check and repair the Oil distributor
valve.
5 Vanes are not moving.
Conduct the overhaul.
Wash out substances stuck to the vane.
6
Components inside the Pump have
burnt out.
Conduct the overhaul.
7 Belt cover screw is loose. Tighten the screw.
8
Rattling sounds on starting or
stopping the machine.
There is no particular problem as it’s a
phenomenon caused by vanes that
temporarily make irregular motions.
9 The tension of the belt is loose. Replace and Re-tension the belt
Abnormal
heating
1
Keeping continuous operation under
high suction pressure.
Pump surface temperature would rise up
around 100
℃
on continuous operation
under high suction pressure.
2
The oil is not supplied by the
specified volume. Control the oil level.
Supply the oil by the specified volume.
3 Oil is dirty.
Replace with new oil.
Conduct the overhaul.
(Inside cleaning)
4 Suction gas is hot.
Install a cooling device such as the
ｇ
as
cooler on the suction side.
5 Area around the Pump is enclosed.
Make the ventilation available.
6 High temperature.
Please use it in environment with the air
conditioning
7
There is a leak in the pipe connecting
with the Pump. Use a Leak detector or the like to find out
the leak position and stop it.
8
The oil is not circulating.
a. Oil pit of the Cover or the like is
clogged.
Conduct the overhaul.
a. Clean the oil pit.