Ulvac PVD-180, Инструкция по эксплуатации

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SK00-4167-DI-002-07
26
Trouble Causes Processing Method
The
pressure
does not
decline,
and the
Pumping
speed is
slow.
1
Pump exhaust capacity is smaller
compared to the Vacuum chamber
capacity.
Select another Pump type.
2
Pressure measurement method is
wrong.
Measure correctly the pressure.
3 Vacuum gauge is not appropriate.
Use the Vacuum gauge that matches the
measurement pressure range and
correctly calibrated one to measure the
pressure.
4
Pipe connected to the Suction inlet is
thin or connection distance is long.
Connect a pipe wider than inlet diameter
and shorten the connection distance
between the Vacuum chamber.
5 Metal mesh at the inlet is clogged.
Remove the pipe above the inlet and wash
the mesh.
6
The oil is not supplied by the
specified volume.
Control the oil level.
Supply the oil by the specified volume.
Conduct the overhaul.
(Replacement of the Pump part)
7
Oil is dirty.
a. Water is being suctioned.
b. Dust is being suctioned.
c. Solvent vapor is being suctioned.
d. Foreign substance enters in.
Replace with new oil.
Conduct the overhaul. (Inside cleaning)
a. Put the trap into the front stage of the
Pump.
b. Put filters/traps into the front stage of
the Pump.
c. Put the trap by use application into
the front stage of the Pump.
d. Put filters into the front stage of the
Pump.
8
There is a leak in the pipe connecting
with the Pump. Use a Leak detector or the like to find out
the leak position and stop it.
9 Not using the ULVAC genuine oil.
Conduct the overhaul of the Pump and
replace the oil with the ULVAC oil.
10 New oil pump was just entered. Perform no-load operation for a while.
11 Leak valve is open Close the valve.
12 Motor rotation direction is reverse.
Do the connection again to correct the
rotation direction.
13
The oil is not circulating.
a. Oil pit of the Cover or the like is
clogged.
Conduct the overhaul.
a. Clean the oil pit.
14 Water entered inside the Pump. Replace the oil.
15
Not opening the solenoid valve.
(PVD-180B, -360B)
Replace the solenoid valve.
16 Exhaust valve vane is broken. Replace the Exhaust valve vane.