Ulvac PVD-180, Инструкция по эксплуатации

Страница: 8 / 37

SK00-4167-DI-002-07
4
Optional specification for special application
Following specification is available to meet various applications.
Table 2 Optional specifications and gasket material/oil type comparison table
Specification
Applicable Model Gasket material
Oil tank capacity
Oil type *1
PVD-180
PVD-360 PVD-180B
PVD-360B
O-ring
Oil seal
Standard NBR Standard ULVOIL R-72
Spec. K FKM Standard ULVOIL R-72
Spec. H n/a NBR Standard ULVOIL R-72
Spec. Z NBR Increase ULVOIL R-72
*1 ULVOIL R-72 stands for mineral oil
【
Spec. K
】
FKM is used for O-ring and sealing material of wetted surface
FKM is used for O-ring and sealing material of wetted surface in the case of Spec.K.
Gases and solvents that are resistant to FKM can be exhausted, but this is not
guaranteed.
【
Spec. H
】
External leak test
It is inspected before shipment if helium leak rate from outside to the Pump is less than
10
-6 Pa
・
m 3 /sec (helium leak test by hood test method). Leak rate will increase due to
aging degradation of seal materials and so leak rate during use is not guaranteed.
* PVD-180B, PVD-360B cannot support Spec.H.
Independent oil filling to oil seal
The Pump inside and atmospheric seal part are isolated each other by closing the
connection pass between the Pump inside and shaft seal by mounting the oiler to the
Pump. The Pump oil circulates through the connection pass in the case of the standard
model.
There is no gas ballast valve. Refer to contents of “gas ballast port close” for performance
described below.
【
Spec. Z
】
Change oil tank capacity to increase oil tank specification
Change the amount of oil in the oil tank to the oil tank specification as shown in Table 3.
This makes it easier to manage the amount of oil during high-load operation.