－24－
Problem Cause
Measures
Reference
⑤
The wire mesh at the inlet
port is clogged.
⑤
Remove the piping from the
upper section of the inlet
port, and clean the wire
mesh.
⑥
The specified amount of oil
has not been added.
⑥
Add the specified amount of
oil.
6.1
⑦
The oil has deteriorated.
⑦
Replace the oil.
6.1
⑧
Leakage occurs from the
pipe connected to the pump.
⑧
Locate the leakage with a
leakage detector and stop
the leakage.
The
pressure
does not
decrease.
⑨
Our specified oil is not being
used.
⑨
Overhaul the pump and
replace with oil specified by
us
7
①
Problem with power supply
voltage
①
Set the power supply voltage
to within ±10% of the rated
voltage.
4.5
②
The motor malfunctions.
②
Replace the motor.
7
③
Foreign matter has entered
the pump.
③
Eliminate the foreign matter
and overhaul the pump.
7
④
The specified amount of oil
has not been added.
④
Add the specified amount of
oil.
4.6
⑤
The coupling spider
malfunctions.
⑤
Replace the coupling spider.
7
Abnormal
sound is
generated.
⑥
Components inside the
pump have burnt out.
⑥
Overhaul (replace the
damaged components).
7
①
Continuous operation at
high evacuation pressure
①
If continuous operation is
performed at a high
evacuation pressure, the
pump surface temperature
increasing 50K.
Under 50K temperature
increasing is not a serious
problem.
②
The specified amount of oil
has not been added. (If the
oil amount is not sufficient,
the cooling effect of the
pump will be reduced.)
②
Add the specified amount of
oil.
4.6
Pump
surfaces are
extremely
hot.
③
The temperature of the
evacuated gas is high.
③
Mount cooling equipment
such as a gas cooler at the
inlet side.
①
The pump is been filled in
excess of the specified
amount.
①
Discharge the oil until it
reduces to the specified
amount.
4.6
A lot of oil
splashes
out from the
outlet port.
②
Continuous operation is
performed at a high
evacuation pressure.
②
Install an oil mist trap at the
outlet side.
7
