Ulvac MBS-053 Скачать руководство пользователя страница 3

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4.2 Environmental conditions for storage , installation and operation

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4.3

Power supply voltage setting

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4.4 Electric

wiring

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a-1)

Unplug-preventive hardware(option)

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a-2) How to install unplug-preventive hardware

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4.5 Fluctuation in the power voltage and frequency

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4.6 Oil

charge

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．

Operation

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5.1 Structure of pump

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5.2

Cautions for operation

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5.3

Start of operation

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5.4

Stopping the operation

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5.5

Protection

feature

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5.6

External control and alarm output

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Maintenance

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6.1 Daily

inspection

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6.2

Long

interval

maintenance

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6.3

Trouble

check

list

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Support in trouble

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Disposal

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Warranty

Safety Data Sheet (SDS)

Pump Usage Check Sheet (Use this sheet for requesting an overhaul.)

Contact address of sales and service departments

Содержание MBS-053

Страница 1: ...3 01 Request to Users When perform installation of the pump and operation please read this manual by all means Please keep this manual to be able to refer anytime Manual contents have a case to modify...

Страница 2: ...ge of hazardous gases and substances 1 1 1 2 Warning Electric shock 2 1 1 3 Caution High temperature 2 1 1 4 Warning Explosion 4 1 2 Safety Data Sheet SDS 4 2 Specification table 5 2 1 Specification 5...

Страница 3: ...arge 16 5 Operation 17 5 1 Structure of pump 17 5 2 Cautions for operation 18 5 3 Start of operation 18 5 4 Stopping the operation 18 5 5 Protection feature 20 5 6 External control and alarm output 21...

Страница 4: ...r wiring diagram 12 Fig 9 An Inlet EN60320 13 Fig 10 Change region of the voltage and frequency 15 Fig 11 Oil plug oil level gauge position 16 Fig 12 Oil level gauge 16 Fig 13 Structure of pump 17 Fig...

Страница 5: ...ention in the security the specifications of this pump and a matter about operation method Read the Manual Thoroughly This product please uses instruction manuals after a reading before use definitely...

Страница 6: ...owing after unpacking 1 The delivered pump is in accordance with your request 2 The specified accessories enough pump oil to use the pump once optional equipment have been provided A normal accessory...

Страница 7: ...fatal accident or serious injury Warning When mishandled there is a possibility of the operator suffering a fatal accident or serious injury Caution When mishandled there is a possibility of the oper...

Страница 8: ...n The Inlet pipe of the pump The Outlet pipe of the pump Always switch off the main power supply before installing electrical wiring or performing any electrical work on the pump Failure to do so may...

Страница 9: ...p to explode the oil level gauge to protrude or the motor to be overloaded This pump is not resistant to pressure The internal pump pressure is limited to 0 03 MPa gauge pressure The Vacuum Pump Unit...

Страница 10: ...or or pump There is a risk of fire Also do not place objects which block ventilation around the motor Abnormal heat generation may result in burns or fire Do not touch the motor while the pump is in o...

Страница 11: ...uthorized waste disposal specialist to carry out disposal Danger This pump is for dry air or the dry nitrogen suck only MBS 053 01 has surface treatment to MBS 053 and it is increasing resistance to c...

Страница 12: ...ricity Never insert hands fingers or thin objects through the motor operating Caution Arrange wires correctly in accordance with the Electrical Equipment Technical Standard and Wiring Regulations Inco...

Страница 13: ...t the temperature of the pump body may exceed 90 and you must fit suitable guards to prevent contact with hot surfaces Please be sure to protect and cool surface of vacuum pump and away from human bod...

Страница 14: ...haust entrance side of the exhaust vent put up and there is a thing that the motor becomes an overloaded 1 2 Safety Data Sheet SDS The attached Safety Data Sheet SDS shows chemical materials which may...

Страница 15: ...t 200W Nominal speed 3500min 1 8 Motor Maximum power consumption 250W Have to power supply when take external control Refer to 5 6 9 speed control voltage External rotating speed control voltage DC 1...

Страница 16: ...m pump Fig 2 Driver Box Interior Connecter for external control SAIE M12B 4 0 5U FP M16 AC Power inlet AC100 120V OR AC200 240V Internal control external control Changeover switch Internal External AC...

Страница 17: ...ing occurs and in addition gives a pump damage of a mechanism Before connecting the pipe to the pump clean the inner walls of the vacuum chamber piping and vacuum valve to completely eliminate moistur...

Страница 18: ...sing a backflow prevention facility When you exhaust an active gas toxic gas use a nitrogen gas for vent Note When open velocity of main valve is early there are the cases that step out of magnet coup...

Страница 19: ...rature gas because it is it with about 80 degrees Celsius 3 3 Ultimate pressure A mechanical booster pump ultimate pressure is decided on by pressure of a fore pump For example become P 100 25 4 0Pa w...

Страница 20: ...wing conditions be satisfied during storage installation and operation Ambient temperature relative humidity 0 C 40 C 85 RH or less Height above sea level during storage and installation 1 000 m or le...

Страница 21: ...f a red wire 100V system and connector of blue wire 200V system 4 Install cover of a box certainly and insert a power cable Warning Power circuit is damaged when I apply voltage more than 150V by conn...

Страница 22: ...Ear thing conductor of a pump connects with earth terminal of building or touchdown point of equipment certainly Unplug cords for power supply before connecting wires Otherwise an electric shock occur...

Страница 23: ...r outlet installed by a qualified electrician This pump must be connected to a grounded metallic permanent wiring system or an equipment grounding terminal or lead on the product An inlet is suitable...

Страница 24: ...ile pushing the unplug preventive hardware at the other end let it catch the hole to the side of the inlet in the interior Raise the unplug preventive hardware Insert the power cable firmly enough Low...

Страница 25: ...e voltage change and frequency change in Domain B it shall operate with main rated values and shall be used practically convenient However operation with it is convenient and safe is maintained on pra...

Страница 26: ...hamber an ultimate pressure rises and there is a case to give a fore pump a failure In addition you cause a sound level increase the pump breakage when the pump runs with lack of lubricating oil Wear...

Страница 27: ...ts and outside magnets in the shape of coaxial including a can shield of nonmagnetic material Transmit power of a motor to a pump using this magnetic field 3 Clearance seal Tend to use oil seal for sh...

Страница 28: ...l immediately Do not block the flow of air to the motor fan as the temperature of the motor and pump will increase 5 3 Start of operation Show normal operational method of this pump with a system of F...

Страница 29: ...th an inner side magnet of magnet coupling and a slip does not come and however there is the case that does not synchronize in the case of load going over transmission capacity of magnet coupling and...

Страница 30: ...ing 6 Over current protection Be motor stopping when go over torque 0 96N m 7 Over current electric fuse AC250V 10A 8 Magnet coupling step out detection Be step out detection when become less than tor...

Страница 31: ...arm occurred be OFF Voltage range 5V 30V Sink current 5mA maximum Weidmuller SAIE M12B 4 0 5U FP M16 Fig 14 External control connector pin assignment The pair of SAIE M12B 4 0 5U FP M16 is SAIL M12G 4...

Страница 32: ...a plug loosens rise of an ultimate pressure and oil leaking out come Once a week Pulled out the power plug before starting inspection and do not turn it on while inspection is in progress Doing so wi...

Страница 33: ...mp inside and remove reaction products 7 The pump does not rotate Components inside the pump have burnt out Overhaul replace the damaged components 7 Problem with power supply voltage Set the power su...

Страница 34: ...dd the specified amount of oil 4 6 The coupling spider malfunctions Replace the coupling spider 7 Abnormal sound is generated Components inside the pump have burnt out Overhaul replace the damaged com...

Страница 35: ...disconnect the plug Do not open a cover of the driver box 7 7 Support in trouble In trouble please contact store or our company overseas business division Customer service department copes adequately...

Страница 36: ...odifications or repairs carried out by a party other than the manufacturer or by a service company not approved by the manufacturer e Malfunctions caused by noise electric disturbance f Malfunctions t...

Страница 37: ...fety and Health Law designates particular substances as the materials to be notified 2 Usage Status Operation Method Approx hours per day years and months Continuous Operation Intermittent Operation U...

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