－7－
3 .Design of vacuum pumping system
3.1 Pumping system
．
Cannot use mechanical booster vacuum pump with a unit, and combine it with a
backing vacuum pump (Fore Pump) by all means.
Note
Please do not take evacuation with only mechanical booster pump.
A
protection feature of a motor works when you perform evacuation only with a
mechanical booster pump, and there is it when step out of magnet coupling
occurs and, in addition, gives a pump damage of a mechanism.
Before connecting the pipe to the pump, clean the inner walls of the vacuum
chamber, piping and vacuum valve to completely eliminate moisture, fine particles,
dust, dirt and rust.
Note
If fine particles, dust or dirt, etc are evacuated, the pump may malfunction.
If moisture is evacuated, not only does the ultimate pressure increase but also
the inside of the pump becomes rusty causing the pump to malfunction.
Note
The inlet filter of the inlet prevents foreign matter from getting into the pump
inside.
Please use it without taking it off.
