Ulvac DTU-20 Series, Инструкция по эксплуатации

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No.29700-2-03-8
High Vacuum Diaphragm Type
Dry Vacuum Pump
DTU-20x
(X: A=100V, B=115V, C=200V, D=220V, E=230V)
Request to Users
Please read this manual thoroughly to ensure safe and
effective use of the equipment.
Keep this manual in a safe place.
Due to periodic improvements in performance, the
equipment described in this manual is subject to
changes in dimensions and specifications without prior
notice.
ULVAC KIKO ,Inc.
Instruction Manual