Ulvac DTU-20 Series, Инструкция по эксплуатации

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１１
6-3 Periodic Inspection
Conduct periodic inspections of consumable parts in every 3,000 hours after started using and replace
parts according to "Guideline of Parts Replacement". Replacement method [6-4. refer to replacement]
of consumable part. In case there is no repair engineer, Ulvac Service Section shall be happy to
replace the parts.
Table 6 -1 Consumable Parts List
Part name Quantity Material Reference life
Diaphragm 4
Main body: Synthetic
rubber
（
EPDM
）
Parts exposing to gas:
PTFE
6,000 hr
Valve 6
FFKM 6,000 hr
Valve
（
With hole
）
2
Bearing 1 set
―――
15,000 hr
Kalrez is registered trademark of DuPont Kabushiki Kaisha.
These
lives
may differ according to the working conditions.
Lives may be extended by operating the pump with smaller load by observing "4-1 Caution in
Operation".
Operating the pump with smaller load means the operation at ultimate pressure (inlet port closed).
Bearings shall be replaced by Ulvac Service Section.