Ulvac DTU-20 Series, Инструкция по эксплуатации

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Cautions for Safety in Use
Applications
(1) This pump is not designed to be explosion-proof, and should therefore not be used to
discharge explosive gases.
(2) In addition to discharge of gas via the outlet, gas may also leak from other parts of the pump,
and it should therefore not be used with toxic gases. If toxic gas is discharged for any reason
it is important to note that the interior of the pump will be contaminated by the gas, requiring
appropriate caution during maintenance.
Maintenance and Repair
(3)
When requesting the manufacturer’s service division to dismantle and repair the pump, always
note the gas which the pump has been used with on the Usage Check Sheet. Note that if it
has been used to discharge toxic gas for any reason it will be contaminated. Please be aware
that use with some gases will preclude dismantling and repair.
Leakage rate
(4) The amount of the leakage of this pump is recorded. Use it in consideration of the leak rate.
The helium gas is used for the Leak examination. Leakage rate:2.6×10
-4
Pa
･
m
3
/sec
※ ：
The measurement of the amount of Leake rate the inside of the pump a vacuum and is a
measurement of the amount of penetration of the helium gas
.
(5) The amount inspection of leaks
（
Flux inspection by the side of an exhaust gas by attainment
pressure
）
0.03L/min
Suck gas
(6)The pump is not designed to prevent leakage of harmful/poisenous/toxic gas.
(7) In case it is used with toxic/corrosive gases proper safety measures shall be implemented by
the end user of which adequacy needs to be evaluated upon installation.
These measures may include employment of safety ducting system, leakage detection
system etc. depending on a comprehensive risk assessment
(8) The vacuum vessel that enters the gas that influences the harmful gas or the human body like
the noxious fume and the environment is exhausted in the vacuum with this pump. There is
causing the poisoning accident and the fatal accident at that time when the vehicle exhaust
emission of the pump is indoors opened.
Please do the following countermeasure and use
the pump safely.
Suck gas [corrosive gases]
(9) It is necessary to connect the vehicle exhaust emission of the pump with a special ventilation
duct or exclusion device. And, do not discharge the vehicle exhaust emission indoors.
(10) Please confirm the thing that doesn't leak to the piping of the pump inhalation side and the
exhalation side.
(11) It is necessary to install the gas leakage detector for the suck gas on the device. When the
leakage is detected, it is necessary to do the setting that intercepts the gas inflow to the pump.
(12) Please exchange the consumable parts to prevent the leakage from the pump every 5000
hours. ( The bearing is excluded.)
(13) Please take shelter at once when the gas leaks by any chance due to the breakdown of the
pump. And, please ventilate the air in the room enough. Moreover, please enter the room of
the device after wearing the hazard mask when you confirm the device. Do not detach the
hazard mask until safety is confirmed.
Suck gas [flammable gases]
(14) The mixed gas within the range of the explosion prohibits exhausting.
(15) It is necessary to connect the vehicle exhaust emission of the pump with a special ventilation
duct or combustion device. And, do not discharge the vehicle exhaust emission indoors.
(16) Please confirm the thing that doesn't leak to the piping of the pump inhalation side and the
exhalation side.
It is necessary to install the gas leakage detector for the suck gas on the device. When the
leakage is detected, it is necessary to do the setting that intercepts the gas inflow to the
pump.Please exchange the consumable parts to prevent the leakage from the pump every
5000 hours. (The bearing is excluded.)
! Danger
04