Ulvac DTU-20 Series, Инструкция по эксплуатации

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7. In Conclusion ···································································································· 19
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Warranty ········································································································· 19
Disposal Parts Material Table Exploded view ························································ 20.21
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Usage Status Check Sheet (For Instruction Manual)
(Please use when requesting overhaul)
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Product information, service bases, and contact information
Drawing List
Fig. 2 -1 DTU-20 Appearance ···················································································· 3
Fig. 3 -1 Change region of the voltage and frequency ····················································· 5
Fig. 3 -2 Piping Example for Evacuation of Container ······················································ 6
Table 1 -1 Equipment Specifications ············································································ 1
Table 6 -1 Consumable Parts List ·············································································· 11
Table 6 -2 Inspection Positions and Guideline of Parts Replacement ································ 12
Table 6 -3 Trouble Check List ··················································································· 17