Ulvac DTU-20 Series, Инструкция по эксплуатации

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１５
Tools to use No. 1, 2, 3, 4, 5
Replacement work procedure
(Replacement procedure from the upper level)
1 Detach handle
⑤
at first.
2 Detach panel
①
of pump left and right.
3 Detach switch plug terminal and ground lead of the side that power cord is connected.
4 Loosen 6 pan head small screws and detach Casing Cover
⑦
.
5 Loosen 6 pan head small screws on pump top face and detach Valve Retainer Cover
②
.
6 Detach Valve Retainer
③
and loosen nuts that fixed Connecting Pipe
④
simultaneously and
detach the pipe.
7 Detach Valve and Pump Head, and Parallel Pin.
8 Insert a spanner of opposite side 13 mm (0.5") into Elongated Hole
⑥
on casing, and detach
Diaphragm.
9 In case spacers are attached to the diaphragm and connecting rod, attach the spacers when
replacing the diaphragm.
10 Attach new diaphragm and tighten with a spanner of opposite side 13 mm (0.5") lightly.
Afterwards, tighten with a torque spanner in 4N·m as final tightening.
11 Align a direction of the pump head and attach it on the diaphragm.(see P.09 for orientation)
12 Confirm a direction of a valve on the circular form shaped portion of pump head and attach it.
(see P.09 for orientation)
13 Insert Parallel Pins in the casing and attach Valve Retainer.
14 Attach Valve Retainer cover
②
and tighten 6 pan head small screws alternatively. Finally, tighten
it with a torque driver (4N
・
m).
15 Attach Connecting Pipe to L Form Coupling on Valve Retainer and tighten nuts with hands.
Afterwards, further tighten with a spanner of opposite side 17 mm (0.7") 1/4 to 3/4 turn
(The diaphragm is bonded on the casing in some
model. In such case, work after removing the
diaphragm from the casing by rotating a shaft.)
CAUTION
If tighten too much with a spanner, it may cause
cracked nuts or leakage. Pay enough attention.
CAUTION