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Table of Contents

ULVAC CRYOGENICS INCORPORATED

Table of Contents

Compressor unit Safety Instructions ·································································· S-1
Disposal Considerations ················································································· IW-1

Section 1.

C30VR

Compressor Description ····················································· 1-1

1.1 Introduction ······················································································ 1-1
1.2 Compressor

model

descriptions ··························································· 1-1

1.3 Terminology ····················································································· 1-2
1.4 Cryopump

system documents ······························································ 1-2

1.5

Roles of compressor in cryopump system ··············································· 1-2

1.6 Compressor

specifications ·································································· 1-3

1.7 Component

descriptions ····································································· 1-7

1.8 CRYO-U

cryopump multiple installation ·············································· 1-12

1.9

Compressor with inverter for refrigerator ··············································· 1-13

Section 2

Considerations before Installation ······················································ 2-1

2.1

Combination of cryopump and compressor ············································· 2-1

2.2 Installation

environment requirements ···················································· 2-1

2.3 Wiring

requirements ··········································································· 2-2

2.4 Cooling

water

requirements ································································· 2-4

2.5

Length of cables and flexible hoses ······················································· 2-7

2.6 Remote

functions ·············································································· 2-7

Section 3

Unpacking and Inspection ································································ 3-1

3.1 Compressor

carton ············································································ 3-1

3.2 Shipping

carton

inspection ·································································· 3-1

3.3 Unpacking

·······················································································

3-2

3.4 Carton

contents ················································································ 3-3

3.5

Inspection of the compressor and accessories ········································· 3-4

3.6

Flexible hoses and specifications ·························································· 3-4

Section 4

Equipment Installation, Piping, and Wiring ··········································· 4-1

4.1 Before

installation ·············································································· 4-1

4.2 Connecting

cooling

water piping ··························································· 4-2

4.3

Connecting and disconnecting helium flexible hoses ································· 4-2

4.4 Single

cryopump

installation ································································ 4-4

4.5 Multiple

cryopump installation ······························································ 4-5

4.6 Electrical

connections

········································································· 4-7

4.7

Wire rooting for compressor and other equipments ································· 4-13

Section 5

Operation ····················································································· 5-1

5.1

Verification of helium static pressure ······················································ 5-1

5.2 Compressor

operation ········································································ 5-2

5.3

Inspection after replacing helium circulation components ··························· 5-4

5.4

Precautions for when compressor is not in operation ································· 5-5

5.5

Maintenance operation for a compressor suspended for a long period ·········· 5-5

Содержание C30VR Series

Страница 1: ...at pump nitrogen gas at pumping speed of 15000L S or more fall under row 2 35 of appended table 1 of Japan s Export Trade Control Order which is based on international export control regimes Customers...

Страница 2: ......

Страница 3: ...where our product is used The personnel are also required to have specialized knowledge skills and qualification on the electricity the machinery the cargo handling and the vacuum Especially the perso...

Страница 4: ...wns resulting from using the product outside the specified specifications of the product Breakdowns due to contamination or corrosion caused by user s use conditions Breakdowns due to natural disaster...

Страница 5: ...splay Serial No Option Part Model Optional Part Serial No 4 Notes for repair and maintenance requests We may decline your request for the repair or the maintenance of our products if you refuse to giv...

Страница 6: ...fer this instruction manual or any of its parts to a third person without written permission from ULVAC CRYOGENICS 2 Information in this document might be revised without a previous notice for the spe...

Страница 7: ...ould result in severe injury or loss of life A caution describes safety hazards or unsafe practices which could result in personal injury or equipment damage Toxic gas or chemicals used There is a ris...

Страница 8: ...F 6 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...

Страница 9: ...nd flexible hoses 2 7 2 6 Remote functions 2 7 Section 3 Unpacking and Inspection 3 1 3 1 Compressor carton 3 1 3 2 Shipping carton inspection 3 1 3 3 Unpacking 3 2 3 4 Carton contents 3 3 3 5 Inspect...

Страница 10: ...re 1 4 C30MVR Front panel Part 1 4 Figure 1 5 C30VR Compressor dimensions 1 5 Figure 1 6 Compressor front view 1 7 Figure 1 7 Compressor rear view 1 8 Figure 1 8 Anchor bolts mounting positions exampl...

Страница 11: ...iptions 4 12 Figure 4 13 Cut length of insulation coating 4 12 Figure 4 14 Fix with set screw 4 12 Figure 5 1 Helium static pressure and ambient temperature 5 2 Figure 5 2 Ready for operation 5 3 Figu...

Страница 12: ...2 4 Table 2 4 Standard cables and flexible hoses 2 7 Table 2 5 Remote interface specifications 2 7 Table 2 6 Remote interface signals 2 9 Table 3 1 Carton contents 3 3 Table 3 2 Optional parts 3 3 Tab...

Страница 13: ...ing helium gas or performing helium line decontamination please read the Maintenance section carefully and follow the instruction Please supply the equipments regulators charging hoses adopters etc th...

Страница 14: ...We collect used adsorbers If there is any used absorber please contact a person in your local dealership or Ulvac Techno Ltd to have it picked up or send it directory to our Service Engineering Divis...

Страница 15: ...g water for compressor The upper limit of the compressor operating ambient temperature is 35 38 except for C30VR Do not use the compressor in unsuitable environments such as dusty highly humid environ...

Страница 16: ...S 4 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...

Страница 17: ...g to directions of the safety supervisor Do not disassemble pressurize heat and or throw into fire The adsorber may explode For safe disposal of an adsorber follow the procedures below 1 Depressurize...

Страница 18: ...IW 2 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...

Страница 19: ...the contents of both the C30VR compressor and related components To ensure safe reliable system performance read this manual as well as other relevant manuals completely to gain a thorough understand...

Страница 20: ...is the CRYO U series cryopump which can pump almost any gas and the other is CRYO T super trap series which is specialized for pumping water Unless otherwise indicated the term cryopump refers to both...

Страница 21: ...re refilling helium gas is not necessary for long time Helium gas is compressed in a highly reliable oil injection type helium compressor Helium gas recovers its purity as it flows through an oil sepa...

Страница 22: ...otor drive Single refrigerator 2 phase motor drive Figure 1 3 C30VR Front panel Part Multiple refrigerators 3 phase motor drive Multiple refrigerators 2 phase motor drive Figure 1 4 C30MVR Front panel...

Страница 23: ...ent types of compressor Table 1 2 Compressor weight Table 1 2 Compressor weight Model Model Weight kg Weight kg C30MVR C30MVER 131 C30VR 127 C30VRT C30PVRT C30MVRT C30MVERT 121 The weights in this tab...

Страница 24: ...y 5 compared to the nominal value 2 Circuit Breaker Current Rating Interrupt Rating Table 1 4 Cooling water requirements Item Requirements Water temperature Cooling water inlet 5 32 Flow rate 5 15 L m...

Страница 25: ...er line 1 1500V Noise immunity Input output line 1 500V 1 By fast transient burst method Test duration 1 min 1 7 Component descriptions This section describes components which need adjustments and or...

Страница 26: ...ge the helium It displays the elapsed tim can not be changed GAUGE The high p indicates the static helium filling pressure when the compressor is not in operation and the supply line helium pressure w...

Страница 27: ...sting system helium pressure for det Use them to move th compressor Figure 1 8 Anchor bolts mounting positions example 8 M10 anchor volt Front All casters of the compressor unit must be locked after t...

Страница 28: ...n operation NOTE CH2 and CH3 indicators are effective only for the C30MVR which can be connected to multiple refrigerators One or more STS LED indicators for alarm indication will light up when malfun...

Страница 29: ...n 1 5 Roles of compressor in cryopump system to understand the operation of helium closed loop cryopump system Also refer to Section 4 3 connecting and disconnecting helium flexible hoses for connecti...

Страница 30: ...on C30MVR can operate up to three cryopumps at a time See Table 1 1 Figure 1 9 depicts a typical multi cryopump installation with single compressor For detailed instructions on cryopump installation w...

Страница 31: ...regeneration time by changing operation frequency Figure 1 10 shows the appearance of the C30VR with an inverter Wire connections and the settings such as inverter frequency depend on your application...

Страница 32: ...C30VR Compressor Instruction Manual 1 14 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...

Страница 33: ...Refer to the table in Appendix B Combination of C30VR Compressor and Cryopump Super trap for typical combinations of cryopumps super traps and compressor units 2 2 Installation environment requirement...

Страница 34: ...m2 5 5mm2 8 mm2 2 1 The color of the ground wire is green 2 Unless otherwise specified 5 5 mm 2 cables are attached to the compressor Supply AC power for compressor from the equipment side distributio...

Страница 35: ...ctor 20 AWG Option 2 Remote cable REMOTE RESPONSE Connector 22 AWG Customer supply 1 It is a specialized cable compatible with conventional general purpose compressors such as C30V and C30MV Current r...

Страница 36: ...nt where the compressor is installed outside Japan It is necessary to check chemicals and water quality to avoid corrosion clogging and other faults caused by low quality of water and or chemicals Not...

Страница 37: ...flow rate water supply temperature and water pressure loss Except for C30PVRT 0 2 0 17 0 1 0 3 0 04M Pa 0 02 0 15 0 05 0 5 10 15 32 30 20 15 10 5 2 7 L min 0 25 Temperature upper limit Temperature lo...

Страница 38: ...install a filter in the Cooling water inlet line in order to remove contaminant in the cooling water Installing a water flow meter in the cooling water line of the compressor is also recommended Temp...

Страница 39: ...for different length of cables and or flexible hoses 2 6 Remote functions Compressors can be remote controlled from customer s equipment side The following provides information on features and functio...

Страница 40: ...hows the remote output interface circuit Each output is an isolated output contact At the equipment side different power supply can be used for each signal However considering that the wiring is seque...

Страница 41: ...operating modes Momentary operating mode and Alternate operating mode You can neither use both operating modes at the same time nor switch one operating mode to the other depending on the situations E...

Страница 42: ...o turn ON COMP START signal Signal functions only for Alternate operating mode COMP ON OFF Compressor start Stop With Alternate operating mode turning this signal ON starts operation of the compressor...

Страница 43: ...and When the compressor starts operation the answer back signal is sent to the equipment Note Refer to Section 2 6 6 Signal timing charts Answer back signal delay as well ALARM Alarm When this signal...

Страница 44: ...CH2 REF COMP RUN CH1 ACK CH2 ACK 1 The holding time is 0 3 seconds or more Figure 2 8 Timing chart for Momentary operating mode with two refrigerators Delay and recovery of Answer back signal Please...

Страница 45: ...shows the signal delay occurred in Alternate operating mode when the time period from a stop to a reboot is short and Figure 2 11 shows the timing chart of C30VR when a short power interruption has o...

Страница 46: ...10 Signal delay when the time period from a stop to a restart is short In Alternate operating mode 1 t 2seconds INPUT POWER SUPPLY COMP START COMP STOP CH1 REF COMP RUN CH1 ACK COMP OPERATION CH1 OPE...

Страница 47: ...C30VR refrigerator operation is synchronized with the compressor operation as shown in Figure 2 11 On the other hand for C30MVR refrigerators operation depends on the command from the equipment side a...

Страница 48: ...C30VR Compressor Installation Operation Maintenance and Troubleshooting 2 16 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...

Страница 49: ...cations 3 4 3 1 Compressor carton Compressors are shipped in a carton with wooden frame at the bottom 3 2 Shipping carton inspection Inspect the carton before unpacking for evidence of damage such as...

Страница 50: ...operate the handling equipment Personnel except for the operator of the handling equipment st keep away from the handling equipment and the compressor during the handling There are risks of dropping...

Страница 51: ...able 3 1 Carton contents Item Quantity Compressor 1 Manual 1 Connector for remote operation 1 Table 3 2 Optional parts Item Quantity Input power cable 3m or customized length 1 Refrigerator cable 3m o...

Страница 52: ...if the helium static pressure is significantly low Accessories Accessories Inspect and visually confirm the accessories that there is no evidence of damage Inspect and visually confirm the accessorie...

Страница 53: ...ng and Inspection ULVAC CRYOGENICS INCORPORATED 3 5 When carry oses keep appropriate bend radius When storing them avoid corrosion a manner to handle other equipments ing flexible h nd condensation in...

Страница 54: ...C30VR Compressor Installation Operation Maintenance and Troubleshooting 3 6 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...

Страница 55: ...es appropriate procedure for installing C30VR and connecting the compressor to a CRYO U cryopump The procedure of connecting the compressor to a CRYO T super trap is the same as connecting to a cryopu...

Страница 56: ...leakage To connect cooling water piping in any other way follow the manual of the component 4 3 Connecting and disconnecting helium flexible hoses Cooling water for this compressor must meet the requ...

Страница 57: ...the braid support straight so that the connection parts fit properly and tighten by hands as tight as possible Then tighten the coupling with two spanners as shown in Figure 4 3 See Figure 4 4 for us...

Страница 58: ...e compressor rear panel and the refrigerator The procedures are shown below Connect the smaller refrigerator cable plug to the refrigerator receptacle For a 2 phase motor refrigerator the plug is self...

Страница 59: ...ryopump 4 5 Multiple cryopump installation Figure 4 6 shows the connection of the compressor and multiple cryopumps 1 First install helium manifolds to the compressor connectors to connect multiple fl...

Страница 60: ...frigerator cable connecting method described in Section 4 4 Single cryopump installation Figure 4 6 Connections of the compressor and multiple cryopumps example with three cryopumps HELIUM MANIFOLD CO...

Страница 61: ...cable first to the compressor and then to the circuit breaker of input power supply source Wiring connection at power supply side must be done properly in accordance with the specifications of custome...

Страница 62: ...cifications and remote functions respectively Figure 4 8 Remote connector pin assignments for C30VR View of from the plug soldering side PIN No PIN No Input Signal Output Signal C30V_R REMOTE RESPONSE...

Страница 63: ...rating mode wiring example for Single yopump operation cr SRCN6A25 24P 6 PIN No PIN No Input Signal Output Signal C30MV_R REMOTE RESPONSE 2 3 4 1 11 3 14 21 22 16 2 Wire gauge AWG22 20 CH1REF CH2REF C...

Страница 64: ...uct command signals but not 6 7 8 and 9 Conversely in Momentary operating mode the pins number 6 7 8 and 9 should be wired as operation command signals but not 15 and 16 Therefore choose appropriate w...

Страница 65: ...be wired as operation command signals but not 6 7 8 and 9 Therefore choose appropriate wiring depending on the operating mode 3 Wire GND pin number 20 only when it is needed GND has the same electric...

Страница 66: ...g cables Peel off the insulating coating to exp proper length of the condu Pass the cables through the end bell and then solder the cables to the connector pins Cover the so If the bundle of the cable...

Страница 67: ...during the operation In addition analog wire is sensitive to and susceptible to noise it must be separated from other wirings in the method above If it is impossible to wire in separated conduits kee...

Страница 68: ...C30VR Compressor Installation Operation Maintenance and Troubleshooting 4 14 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...

Страница 69: ...hat the flexible hoses between the compressor and the refrigerator are connected properly 3 See Figure 5 1 and check the proper helium filling pressure value at the actual room temperature 4 Make sure...

Страница 70: ...mpressor chassis is normally turned on therefore the compressor will be powered on immediately by switching a power supply on the equipment side Inspection of phase and voltage of an input power suppl...

Страница 71: ...STS indicators lights up and or the buzzer sound does not stop refer to Section 8 Troubleshooting to solve the problem WARNING There is a danger of hazardous voltage Only qualified electrical personn...

Страница 72: ...ent of the product explained in the following For reference the helium pressure during operation of C30MVR refrigerator R10 series andC30PVRT refrigerator R80 series with 3m flexible hoses are shown i...

Страница 73: ...from the compressor Also if the compressor will be stopped for long period it is recommended to stop supplying cooling water to avoid corrosion or clogging of the pipes inside the compressor and the...

Страница 74: ...C30VR Compressor Installation Operation Maintenance and Troubleshooting 5 6 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...

Страница 75: ...er out from the compressor under the conditions listed below Cooling water freezing When there is a danger of bursting cooling water piping due to freezing of the cooling water in the compressor Long...

Страница 76: ...WATER OUT fitting as well 6 1 2 Disconnecting flexible hoses To disconnect flexible hoses from the compressor refer to Section 4 3 Connecting and disconnecting helium flexible hoses Put the dust caps...

Страница 77: ...oses and cables with covers or boxes Store them with the compressor Ensure that cooling water has been completely drained out from the compressor To store the compressor cover it with a plastic sheet...

Страница 78: ...C30VR Compressor Installation Operation Maintenance and Troubleshooting 6 4 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...

Страница 79: ...nance Cycle h Adsorber replacement Max 24000h 30000h for C30MVE_R Refrigerator maintenance When needed See cryopump instruction manual Inspection for plumbing and wirings 12000h NOTE If a special main...

Страница 80: ...screw driver and remove the rear panel Figure 7 2 and 7 3 6 Disconnect the self sealing coupling from the adsorber with two spanners The coupling is connected to the flexible hose above the bottom pla...

Страница 81: ...he mounting tab on the base of the compressor And then remove the adsorber from the compressor Figure 7 7 Hold Remove Figure 7 1 Remove two nuts from the helium gas connectors Figure 7 2 Remove all se...

Страница 82: ...10 Connect self sealing coupling to the adsorber with the two spanners Tighten the coupling referring to Figure 7 5 Recommended tightening torque is 20N m Connect the coupling quickly to minimize hel...

Страница 83: ...a note of the value that the current accumulated operation time added to the adsorber replacement cycle hours in Table 7 1 Refer to Section 9 Disposal of equipment and component parts for disposing of...

Страница 84: ...ium gas 3 Wait until the helium pressure gauge reads the prescribed standard value described above When the pressure reaches the standard value close the valve by turning its knob clockwise 4 Replace...

Страница 85: ...ng helium gas is required When charging helium or performing helium circuit decontamination equipments regulators charging hoses adopters etc that can be used at 2 0MPaG or above are required Table 7...

Страница 86: ...le flared end connect this side to the compressor Pressure regulator handle Bottle valve Pressure regulator Helium bottle Helium charging hose The purity of helium gas to be charged must be above 99 9...

Страница 87: ...pen the helium filling valve slightly turn it counter clockwise Allow a small amount helium gas to flow through the helium filling valve and the helium filling fitting to purge the air between them 4...

Страница 88: ...ck the breaker at OFF status for safety reason Disconnect the input power cable from the compressor Fol wing procedure must be undertaken by authorized electrician and mechanical personnel familiar wi...

Страница 89: ...state There are eight indicators called STS at the front panel of the compressor Please refer to Figure 8 1 for the alarm types of warnings and faults The alarm status code table shown in Figure 8 2 i...

Страница 90: ...ailure of power supply DC24V inside controller Blown fuse or power supply failure Call for servicing RDY indicator is OFF STS indicators indicate ALARM status and buzzer activated Does not meet requir...

Страница 91: ...Set power supply voltage within the available range Relay fault inside Controller or fault such as refrigerator cable disconnection Call for servicing Replace the refrigerator cable RDY indicator lig...

Страница 92: ...he compressor status and main power phase sequence If the input power supply voltage is low check the input power line and the user s power supply that has distributed electric power to the compressor...

Страница 93: ...he alarm is not cleared by the procedures above please contact our Service Engineering Division or the nearest customer support center immediately CP2 Cold Head Trip Qvercurrent of refrigerator When t...

Страница 94: ...Please contact our Service Engineering Division or the nearest customer support center for replacement and adjustment of the controller Other Status whereby both RDY and STS indicators are OFF In nor...

Страница 95: ...OR S N CRYO U OPERATING LOG POWER Cryopump Measuring condition Compressor unit Temperature Pressure Remarks 1st stage 2nd stage Date Time Measurer Room temp Humidity ETM High pressure helium gas MPaG...

Страница 96: ...C30V_R Compressor Installation Operation maintenance and troubleshooting A 2 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...

Страница 97: ...3 R10 R10R RM10 1 1 3 2 3 R10T R10RT RM10T 1 2 3 R20 R20R RM20 1 1 2 R20T R20RT RM20T 1 1 2 U16L 16 R20 R20R RM20 1 1 R50 R50R RM50 1 1 R50T R50RT RM50T 1 1 U20P 20 R50 R50R RM50 1 1 U20H U20HSP U20H...

Страница 98: ...C30V_R Compressor Installation Operation Maintenance and Troubleshooting B 2 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...

Страница 99: ...s of setting and connections are shown in Table C 1 Table C 1 Differences on devices between compressor unit models Refrigerator Figure Model OL1 setpoint Cable Connector Max quantity Scott Transforme...

Страница 100: ...RESSOR MOTER TB2 COLD HEAD UL1015 14 YW BE BE YW BE YW BE YW YW BE UL1007 18 UL1007 18 UL1007 24 UL1007 24 UL1007 24 UL1007 24 BK BK RD RD UL1007 18 UL1007 18 YW GN BK WT RD UL1015 10 UL1015 10 UL1015...

Страница 101: ...YW YW BE YW BE UL1007 18 UL1007 18 UL1007 24 UL1007 24 UL1007 24 UL1007 24 BK BK RD RD UL1007 24 UL1007 18 UL1007 18 YW GN BK WT RD UL1015 10 UL1015 10 UL1015 10 Cold Head No3 Cold Head No 2 Cold Head...

Страница 102: ...5 FG YW GN UL1007 16 GN YW GN UL1007 18 BK RD BE YW YW YW BE BE BE YW E4 BK RD E T S R TB2 UL1015 14 YW BE BE YW BE YW BE YW YW BE UL1007 18 UL1007 18 UL1007 24 UL1007 24 BK BK RD RD UL1007 18 UL1007...

Страница 103: ...BK RD E T S R YW BE YW BE YW BE TB2 COLD HEAD UL1015 14 YW BE BE YW BE YW BE YW YW BE YW BE UL1007 18 UL1007 24 UL1007 24 UL1007 24 UL1007 24 BK BK RD RD UL1007 18 UL1007 18 YW GN BK WT RD UL1015 10...

Страница 104: ...C30VR Installation Operation Maintenance and Troubleshooting C 6 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...

Страница 105: ...oval of compression caused heat It is cooled to an ambient temperature and then enters an oil separator In here the oil is separated and the droplets of separated oil pass thorough an oil return filte...

Страница 106: ...separator Adsorber Oil return filter Oil return orifice S Solenoid valve for pressure equalization Oil injection filter LPS TS2 Differential pressure regulating valve Compressor pump OUT TS3 Oil heat...

Страница 107: ...397 0112 Fax 81 6 6397 0126 Inquiries about cryostats or LN2 generators Kyoto Factory 140 1 Megawa Makishima cho Uji kyoto 611 0041 Japan Tel 81 774 28 5595 Fax 81 774 20 2201 ULVAC CRYOGENICS KOREA I...

Страница 108: ...CS 2 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...

Страница 109: ...ht has been corrected Introduction has been revised SERVICE NETWORK has been revised RM refrigerator has been added Full fledged revision Carton contents have been changed Cover Export control policy...

Страница 110: ...Revision History R 2 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...

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