Ulvac C30VR Series, Инструкции по установке, эксплуатации, техническому обслуживанию и устранению неисправностей

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C30VR Compressor Instruction Manual
The plug for remote cables is supplied with the compressor. Customers need to
solder the cables to use it. Refer to “Section 4.6.2 Connecting remote cables” for
definitions of connector pin assignments
and appropriate connection method for
your application.
1.8 CRYO-U
®
cryopump multiple installation
C30MVR can operate up to three cryopumps at a time (See Table 1-1). Figure 1-9 depicts
a typical multi-cryopump installation with single compressor.
For detailed instructions on cryopump installation with compressor, refer to “Section 4.4
Single cryopump installation” and “Section 4.5 Multiple cryopump installation”
Helium supply lines
Helium
manifolds
Cooling water
Remote cable
Helium return lines
Refrigerator cables
AC Input power
IN
OUT
Figure 1-9 Cryopump installation with C30MVR compressor
1-12 ULVAC CRYOGENICS INCORPORATED