Ulvac C30VR Series, Инструкции по установке, эксплуатации, техническому обслуживанию и устранению неисправностей

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Section 2 Considerations before Installation
Section 2 Considerations before Installation
2.1 Combination of cryopump and compressor ........................................ 2-1
2.2 Installation environment requirements ................................................ 2-1
2.3 Wiring requirements ............................................................................ 2-2
2.4 Cooling water requirements ................................................................ 2-4
2.5 Length of cables and flexible hoses .................................................... 2-7
2.6 Remote functions ................................................................................ 2-7
This section provides the information which should be considered before installing the
compressor.
Below are the explanations of combination with cryopump, installation environment requirements,
wiring requirements, cooling water requirements, length of cables and flexible hoses, remote
functions, and subsidiary functions.
NOTE : C30VR compressor and refrigerators which can be connected to C30VR do not comply
with EN standard (CE mark) and American standard (NEC and UL standard) by itself.
Please consider our C30FX cryopump system in order to comply with your local state,
national, federal and international standards as a unit.
2.1 Combination of cryopump and compressor
Refer to the table in “Appendix B Combination of C30VR Compressor and Cryopump/
Super trap” for typical combinations of cryopumps/super traps and compressor units .
2.2 Installation environment requirements
Refer to Table 1-5 in Section 1 and check the installation environment and operating
conditions to ensure there is no problem. The environment should be free from
contaminants such as oil, coolant and other suspended solids. Compressor should be
installed in a space with enough ventilation to avoid suffocation in a case of helium
leakage.
Figure 2-1 shows the dimensions of installation space and levelness of the floor required
to maintain the performance of a compressor. The compressor should be installed on a
flat floor surface.
Clear the back, front and sides of the compressor to maintain cooling by natural air flow.
Also, a pace of 500mm back and front of the compressor is needed for maintenance.
CAUTION
s
Around e power cable in the back, keep space for working easily. In addition, easy
access the handle of main circuit protector (MCP) on the back must be ensured. th
to
Refer to Figure 1-5 in Section 1 for the dimensions of the compressor.
ULVAC CRYOGENICS INCORPORATED 2-1