Ulvac C30VR Series, Инструкции по установке, эксплуатации, техническому обслуживанию и устранению неисправностей

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Section
７
Maintenance
ULVAC CRYOGENICS INCORPORATED 7-5
12. Replace the rear panel and secure it by tightening the seven screws.
13. Put the two removed nuts back on to the “SUPPLY GAS” and “RETURN GAS”
connectors at the rear panel of the compressor and tighten each nut using the two
spanners supplied.
14. Connect the flexible hoses to the “SUPPLY GAS” and “RETURN GAS” connectors at
the rear panel of the compressor. Refer to “Section4.3 Connecting and
disconnecting helium flexible hoses” for connecting method.
15. Check the helium static pressure. Refer to “Section 5.1 Verification of helium static
pressure”.
If the pressure is higher or lower than it should be,
adjust it referring to the following
“Section7.3 Adjusting system helium pressure”.
16. Record the date and accumulated operation time when the adsorber was replaced in
the adsorber replacement record label on the front panel of the compressor.
As a guide for the next replacement, it is recommended to make a note of the value
that the current accumulated operation time added to the adsorber replacement cycle
hours in Table 7-1.
Refer to “Section 9 Disposal of equipment and component parts” for disposing of used
adsorber.
7.3 Adjusting system helium pressure
System helium pressure must be adjusted when the compressor is not in operation.
Refer to “Section 5.1 Verification of helium static pressure” for prescribed standard
pressure value when the compressor is not in operation.
Prescribed standard pressure value while the compressor is in operation is the value
recorded at “Section 5.2 Compressor operation, (7) Recording the helium pressure during
the operation”.
If the pressure has changed to
±
0.04 or more MPaG from the prescribed standard value,
follow the procedure below and adjust the system pressure.
All helium circulation components must be connected when adjusting the pressure of the
cryopump system.
CAUTION
Following procedure must be undertaken by authorized electrician and mechanical
personnel familiar with the construction and risk of this equipment. Failure to observe this
WARNING
warning may result in severe bodily injury or fatal accident.