Ulvac C30VR Series, Инструкции по установке, эксплуатации, техническому обслуживанию и устранению неисправностей

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Section 1 C30VR Compressor Description
Section 1. C30VR
_
Compressor Description
1.1 Introduction ............................................................................................. 1-1
1.2 Compressor model descriptions ............................................................. 1-1
1.3 Terminology ............................................................................................. 1-2
1.4 Cryopump system documents ................................................................ 1-2
1.5 Roles of compressor in cryopump system .............................................. 1-2
1.6 Compressor specifications ...................................................................... 1-3
1.7 Component descriptions ......................................................................... 1-7
1.8 CRYO-U
®
cryopump multiple installation .............................................. 1-12
1.9 Compressor with inverter for refrigerator .............................................. 1-13
1.1 Introduction
C30VR is the successor of C30V/C30MV/C30MVE/C30PV, a compressor for cryopump
systems and it is highly compatible with these conventional compressors.
NOTE : All personnel involved in installation, operation, adjustment, maintenance
and servicing must be familiar with the contents of both the C30VR compressor
and related components.
To ensure safe, reliable system performance, read this manual as well as other
relevant manuals completely to gain a thorough understanding before beginning
work.
1.2 Compressor model descriptions
C30VR has several models as below (See Figure1-1, Table1-1) differentiated by model
designations. The model designation is written on the shipping list and nameplate of the
compressor except for optional products.
*
１
:Standard helium gas filling pressure is different between a pump and a trap.
C 3 0 V R
Number of refrigerator
Blank= Single (1 refrigerator)
M = Multiple (Max. 3 refrigerators)
Helium gas filling pressure
Blank= Standard
P = High filling
Power consumption
Blank= Standard
E = Power saving
Refrigerator model
Blank= 2 phase motor drive
T = 3 phase motor drive
Figure 1-1 C30VR Compressor models
ULVAC CRYOGENICS INCORPORATED 1-1