Ulvac C30VR Series, Инструкции по установке, эксплуатации, техническому обслуживанию и устранению неисправностей

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Section 1 C30VR Compressor Description
ULVAC CRYOGENICS INCORPORATED 1-11
⑨ CIRCUIT PROTECTOR (Inside the panel)
The circuit protector is installed in order to protect wiring and connectors from the
over-current produced by an electrical overload or short circuit.
The circuit protector is set to ON when it is shipped.
⑩
COLD HEAD(REFRIGERATOR)CABLE RECEPTACLES
（
COLD HEAD POWER NO.1, NO.2, NO.3
）
Connect refrigerator cables for cryopump operation to these receptacles.
C30MV
_
R has three receptacles (No.1
～
No.3).
C30VR has one receptacle (No.1).
⑪ HIGH PRESSURE HELIUM SUPPLY CONNECTOR （ SUPPLY GAS ）
High pressure helium gas is supplied to the cryopump through this connector. A 1/2
self-sealing coupling is used.
Refer to “Section 1.5 Roles of compressor in cryopump system” to understand the
operation of helium closed-loop cryopump system.
Also refer to “Section 4.3 connecting and disconnecting helium flexible hoses” for
connection method of helium lines.
⑫
LOW PRESSURE HELIUM RETURN CONNECTOR
（
RETURN GAS
）
Connect a return line of low pressure helium gas from cryopump to this connector. A
1/2 self-sealing coupling is used.
Refer to “Section 1.5 Roles of compressor in cryopump system” to understand the
operation of helium closed-loop cryopump system.
Also refer to “Section 4.3 connecting and disconnecting helium flexible hoses” for
connection method of helium lines.
⑬
COOLING WATER INLET (WATER IN
）
Cooling water from customer’s facility is supplied through this inlet to cool the
compressor during operation. Customers need to have cooling water piping as a part
of the facility.
Refer to “Section 4.2 Connecting cooling water piping” for connection of cooling water.
⑭
COOLING WATER OUTLET
（
WATER OUT
）
Cooling water used in the compressor returns from this outlet to customer’s facility.
Refer to “Section 4.2 Connecting cooling water piping” for connection of cooling water.
⑮
REMOTE INPUT-OUTPUT RECEPTACLE
（
REMOTE RESPONSE
）
Connect the remote cables to this receptacle.
The cryopump and the compressor can be operated through the remote cables. It
also enables sending of operation answer-back signals and alarm signals activated in
an event of compressor failure to the equipment-side. Refer to “Section 2.6 Remote
functions” for details of remote functions.
WARNING
Circuit protector must be operated by authorized electrician familiar with the structure and
the risk of this equipment. Failure to observe this warning may result in severe bodily
injury or fatal accident.