Ulvac C30VR Series, Инструкции по установке, эксплуатации, техническому обслуживанию и устранению неисправностей

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C30VR Compressor Installation, Operation, Maintenance and Troubleshooting
5-4 ULVAC CRYOGENICS INCORPORATED
（６） Cryopump operation
The cryopump (refrigerator) operation can be started after pumping down the cryopump
below 40Pa by a roughing pump (refer to cryopump manual for details). The cryopump
condenses and adsorbs the gas molecules on its cryogenically-cooled panels (cryopanel).
The compressor operates continuously throughout the cryo process.
（７）
Recording the helium pressure during operation
Helium high-pressure side pressure gauge on the front panel indicates the pressure of the
helium supply line of the compressor.
Read the maximum pressure value at the time of starting the compressor operation.
Keep the cryopump system operating and read the pressure value of helium pressure
gauge when the system is pumping steadily.
Write down these values in the Appendix A Table A-1, operating log sheet.
These two recorded values depend on the length of flexible hoses and a kind of the
refrigerator mounted on the cryopump system. The recorded values are used as
reference value for maintenance or replacement of the product explained in the following
.
For reference, the helium pressure during operation of C30MVR (refrigerator R10 series)
andC30PVRT (refrigerator R80 series) with 3m flexible hoses are shown in Table 5-1.
Table 5-1 Supply line helium pressure during operation
C30MVR
＋
R10/R10R/RM10 Refrigerator
C30PVRT
＋
R80/R80RT/RM80T
Refrigerator
Quantity of refrigerator 1 2 3 1
Helium Pressure at
Start-up [MPaG]
Below 2.1 Below 2.3
Helium temperature when
cryogenically cooled
[MPaG]
1.6 - 1.8 1.65 - 1.75 1.5 - 1.6 1.9 - 2.0
(Remarks)
1. Length of helium flexible hose : Standard ( 3m )
2. Room Temperature : 20
℃
5.3 Inspection after replacing helium circulation components
After replacing a component such as a cryopump, a flexible hose, and a compressor refer
to “Section 5.1 Verification of helium static pressure” and check that the helium filling
pressure is almost equal to the value before replacing the component.
In addition, if the system installation condition has been changed, conduct “ Recording the
helium pressure during the operation ” described above.
The compressor is intended for continuous, not intermittent operation. The number of
starting/stopping of the compressor pump must be six or less times per hour. Failure to
observe this warning may result in damage to and/or life shortening of the compressor.
CAUTION