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ORIC

®

Piezo Stage Controller PDXC

Chapter 3: Overview

Rev B, September 23, 2021

Page 3

Chapter 3

Overview

3.1. Introduction

The PDXC Piezo Stage Controller is designed to control our PD1(/M) Piezo Inertia Linear Translation Stage,
PDX1(/M) Piezo Inertia Linear Translation Stage with an Optical Encoder, and PDR1(/M) Piezo Inertia Rotation
Stage. It offers two channels of open-loop stage control (SMC outputs), and one channel of both open- and closed-
loop stage control (15-Pin D-SUB output). The user can easily switch between operations by turning the knob after
powering on the unit. It also supports remote PC control via the USB or RS-232 ports on the back panel, and a USB
mouse can be connected to the front panel for intuitive control. The product supports daisy-chain mode in which
several controllers work together to move multiple stages at very low delay by inserting RJ-45 cables between them.
The controller also supports external I/O control, including analog in and out, and trigger in and out signals. There
are several external trigger modes inside to support either single motion or conjunction motions, such as a raster
scan. For best convenience of control, the user can interact with the device by using the buttons and knob on the
front panel while observing the LCD display.

Figure 3.1 Outlook of PDXC Controller

Features

▪

Stages with open- and closed-loop operation are supported

▪

A modular linear amplifier paired with a high-power power supply outputs a peak current of 10 A to drive
the stage.

▪

The high current coupled with the optimized waveforms stably drive the stage as fast as 20 mm/s.

▪

Even at its highest speed, the optimized high-speed PID values allow the stage to move at ±2% speed
deviation in closed-loop mode.

▪

High positioning resolution up to 10 nm.

▪

With dynamic adjustment, the device stays at any precise position within a range of 10 nm in closed-loop
mode.

▪

Low time delay between devices when in daisy-chain mode.

3.2 Operation Principle

The controller mainly consists of 2 PCB boards, the MCU board, and the power board. The MCU board generates
a sawtooth waveform (Figure 3.2.1) while the power board magnifies the amplitude signal. The waveform is then
exported to the 15-pin D-SUB connector or SMC connector on the front panel to drive the different stages.

The stage uses a piezo inertial drive motor, which consists of three main parts: a flexure-coupled piezo actuator, a
friction element, and a slider (as seen in Figure 3.2.2). During the "stick" part of a cycle, the piezo slowly expands
under the ramp voltage, pushing the friction element and the slider forward in unison. During the "slip" part, the
drive voltage drops rapidly and the piezo element returns to its starting length, with the friction element "slipping"

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Содержание PDXC ORIC

Страница 1: ...PDXC ORIC Piezo Stage Controller User Guide ...

Страница 2: ...e in Open Loop Operation 13 4 2 6 Save Parameters in D Sub Mode 14 4 2 7 Homing 15 4 2 8 Encoder Calibration 16 4 3 SMC Output Mode 17 4 3 1 Channel Selection 18 4 3 2 Setting Velocity Value 18 4 3 3 Set Step Size 19 4 3 4 Save Parameters 20 4 4 Over Current Protection 21 4 5 Firmware Update 21 Chapter 5 Software 23 5 1 D Sub Output Mode 23 5 1 1 D Sub Output Mode Main Menu 23 5 1 2 Device Status ...

Страница 3: ...43 6 3 14 ETM x ETM ETMALL Daisy Chain Command 43 6 3 15 PLT x y PLT Position Limit Command 44 6 3 16 AMD n AMD Abnormal Move Detection 44 6 3 17 LP n LP Loop Control 44 6 3 18 SS n SS SS2 n SS2 Step Size Set 44 6 3 19 SD n SD Step Distance Control 45 6 3 20 ERR Error Message 45 6 3 21 ING x INO x OUG x OUO x ING INO OUG OUO External Gain and Offset Set 45 6 3 22 SPR n POSP Step Response 46 6 3 23...

Страница 4: ... Symbol Description Direct Current Alternating Current Both Direct and Alternating Current Earth Ground Terminal Protective Conductor Terminal Frame or Chassis Terminal Equipotentiality On Supply Off Supply In Position of a Bi Stable Push Control Out Position of a Bi Stable Push Control Caution Risk of Electric Shock Caution Hot Surface Caution Risk of Danger Warning Laser Radiation Caution Spinni...

Страница 5: ...ng Plugging or unplugging the connector while the unit is powered on can cause damage to the stage and or controller DO NOT OPEN HOUSING Except for the main fuse which is accessible from the outside of the housing the PDXC has no user serviceable parts Service should only be performed by trained service personnel WARNING This unit must not be operated in explosive environments Additionally this un...

Страница 6: ...the LCD display Figure 3 1 Outlook of PDXC Controller Features Stages with open and closed loop operation are supported A modular linear amplifier paired with a high power power supply outputs a peak current of 10 A to drive the stage The high current coupled with the optimized waveforms stably drive the stage as fast as 20 mm s Even at its highest speed the optimized high speed PID values allow t...

Страница 7: ... condition Due to several factors that include the application conditions piezo hysteresis component variance and the axial load the achieved step size will vary and is not repeatable To help overcome this variance and accurately control the stage movement an external feedback system is added for closed loop control of the feedback slider position to controller Figure 3 2 1 Sawtooth Waveform Figur...

Страница 8: ...s compatible with 100 240 VAC 50 60 Hz power sources Shipped Connectors Ethernet Cable 2 m Male Cat5e Connector to Male Cat5e Connector I O Cable 0 5 m Female 9 Pin D Sub Connector to 4 Male BNC Connectors USB Cable 2 m Male Type A Connector to Male Type B Connector Power Supply Cable 1 5 m Male NEMA 5 15 P Connector to Female IEC 320 C13 C14 Connector Two SMC ports for connecting to two PD1 M ope...

Страница 9: ...ol the stage movement by scrolling the wheel back and forth When the device is set in open loop operation it will move a set number of pulses with each scroll while in closed loop operation it will move at a set step distance with each scroll CH1 CH2 The SMC ports can be used to control open loop stages 15 Pin D SUB Connect to stages with both open and closed loop operation which work with resolut...

Страница 10: ...SigOut1 Piezo Output 1 14 5 V TTL EEPROM 1 Wire EEPROM 15 Reserved Table 3 3 8 15 Pin D SUB Signal Definition 3 3 3 Back Panel Figure 3 3 9 PDXC Back Panel Connectors Two RJ 45 Ports Connects to another PDXC device using either the IN or OUT port with the included ethernet cable It can connect up to 12 devices Please refer to Figure 3 3 14 and Table 3 3 15 for pin assignment and signal definition ...

Страница 11: ...Actual Position 7 0 to 5 V Trigger Out Trigger When Actual Position is on Target 8 0 V GND Ground Pin 9 Reserved Table 3 3 11 I O Signal Definition An I O cable is also provided to breakout the Trigger In Trigger Out Analog In and Analog Out pins to BNCs Figure 3 3 12 RS 232 Port Pin Assignment Pin No Voltage Range Name Description 1 N C Not Connected 2 15 to 15 V TXD Transmits Data 3 15 to 15 V R...

Страница 12: ...45 Signal Definition Pin No Voltage Range Name Description 1 5 V TTL Ext_Sync_p Daisy Chain Clock 2 5 V TTL Ext_Sync_n Daisy Chain Clock 3 N C Not Connected 4 5 0 V GND Ground Pins 6 N C Not Connected 7 10 to 10 V RS_485_p Positive Daisy Chain Signal 8 10 to 10 V RS_485_n Negative Daisy Chain Signal ...

Страница 13: ...n the device will enter its last operation mode after 3 seconds of idle in the output selection screen If the stage is connected via D Sub connector the device will automatically enter D Sub mode Otherwise the controller will enter SMC mode unless the user turns the knob or clicks the ENTER button 4 2 D Sub Output Mode Select D SUB at the mode selection screen right after initialization to enter D...

Страница 14: ...Position When in the SMC output main screen turn the knob to move the stages according to preset velocity speed and step size To change the velocity and step size setting please refer to Section 4 2 2 Panel operation allows the user to move only one stage at a time Moving two stages simultaneously would require software or command line operation 4 2 2 Set Velocity in Closed Loop Operation To chang...

Страница 15: ...de of the D Sub output turning the knob will move the stages according to preset velocity speed and step size To change the velocity and step size setting please refer to Section 4 2 4 Figure 4 6 Open Loop Operation in D Sub Output Mode Main Screen 4 2 4 Set Velocity in Open Loop Operation To change the velocity setting in open loop operation press ENTER at the D Sub mode main screen to enter the ...

Страница 16: ...any increments the stage took within a single step To set the STEP size in open loop operation of the D Sub output mode press the ENTER button at the D Sub mode main screen to enter the menu then follow the flow chart below Press ENTER to enter the menu screen and select OPEN LOOP D Sub mode main screen Turn knob to select VELOCITY and press ENTER Turn knob to change the velocity value and press E...

Страница 17: ... Sub mode the user can also save all the operation parameters and settings speed for close loop velocity level for open loop position and step size in the non volatile memory Press ENTER to enter the menu screen and select OPEN LOOP D sub mode main screen Turn knob to select STEP and press ENTER Turn knob to change the step size and press ENTER to validate the setting ...

Страница 18: ...op operation or after power cycles The homing process scans the stage across its entire travel range and looks for a HOME position to set as the absolute reference position for the stage All the stage movements are executed relative to that HOME position To execute the homing process follow the flow chart below Press ENTER to enter the menu screen and turn knob to toggle down the screen until it s...

Страница 19: ...an be performed by users The device will query if calibration is needed upon each power recycle if D Sub is active The user may need to do calibration if the position reported is not accurate or when the homing process has failed multiple times When the stage connected to the PDXC requires recalibration the below screen will appear on the LCD screen automatically Figure 4 11 Calibration Indication...

Страница 20: ...re 4 15 Step 4 of Calibration 4 3 SMC Output Mode Select SMC at the mode selection screen right after initialization to enter SMC output mode In SMC output mode only open loop stages are supported There are no encoders on those stages thus no position and speed feedback signal So only open loop operation is possible When in the SMC output main screen rotate the knob will move the stages according ...

Страница 21: ...ftware or command line operation 4 3 2 Setting Velocity Value In SMC output mode the moving speed of the stage is defined by how many increments the stage took within a second This corresponds to how many pulses of driving signal are sent to the stage from the controller In SMC mode the value of the speed can be set between 800 to 20000 steps pulses per second To set the velocity in SMC mode press...

Страница 22: ...EP size of the stage is defined by how many increments the stage took within a single step To set the STEP size in SMC mode press the ENTER button at main SMC mode screen to enter the menu Then follow the flow chart below Press ENTER to enter the menu screen and choose PARAMETERS Select VELO of the corresponding channel Turn knob to change the velocity value SMC mode main screen ...

Страница 23: ... 3 4 Save Parameters In SMC mode the user can also save all the operation parameters and settings contains velocity and step size for each channel in the non volatile memory Press ENTER to enter the menu screen And choose PARAMETERS Select STEP of the corresponding channel Turn knob to change the step size SMC mode main screen ...

Страница 24: ...essage Figure 4 21 Warning Screen 4 5 Firmware Update The PDXC allows users to update its firmware The most up to date firmware and the firmware update tools are both available on the software tab of the PDXC page on the Thorlabs website www thorlabs com To update the controller firmware connect the controller to a PC with the USB cable included Keep holding down the BACK button when powering on t...

Страница 25: ...om the website http www thorlabs com select the correct COM port and connect Figure 4 23 Select COM port on Firmware Update Tool Click Browse to select the new firmware file Figure 4 24 Select Firmware File on Firmware Update Tool Click Update to start the firmware update The device will automatically reboot after the firmware update is complete ...

Страница 26: ...he main menu containing Connect Disconnect Home Store Options Update Support and Help The display below is the part number of device as well as the hardware and firmware version numbers The Position and Velocity parameters are in units of mm and mm s respectively The same operations from the front panel are available users can switch between closed loop and open loop operations For more intuitive ...

Страница 27: ...ing the PID values as they are already optimized for speed and stability in factory and could lead to non optimum performance if not correctly tuned The analog out parameter will be explained in detail in Section 5 1 6 External Trigger Mode The Abnormal Move Detect setting is used to monitor the stage moving and will give warnings if any abnormal movement occurs on the stage Update Update the PDXC...

Страница 28: ...get position Jog Move the stage one step according to the preset step size Above the move buttons are the sections to set the main movement configurations Here users can set the target position for the stage to move to the velocity in closed loop operation and the jog step size as well as jog speed in open loop operation 5 1 4 Position Range Limit The position range limit section are on the left b...

Страница 29: ...aracteristics and pin distribution of the I O port please refer to Table 3 1 An I O cable is also provided to breakout the pins of the I O port into BNC connectors Please be aware that before entering trigger mode the device should be switched to closed loop operation and homing should be performed There are three sub modes of operations Analog In Fixed Step Size and Fixed Positions Analog In In t...

Страница 30: ...nals So only open loop operation is possible There is no HOME function anymore and it is only possible to use the Jog buttons to move the stages In SMC mode 2 channel operation of stages is possible Toggle between two channels is possible in the checkbox on top right corner of the GUI In SMC output mode the moving velocity speed of the stage is defined by how many increments the stage took within ...

Страница 31: ...de separately Notice this setting is valid for both channels Figure 5 9 Output Amplitude Adjustment 5 3 Daisy Chain Operation When users want to control multi axis stages to move simultaneously they can set up daisy chain connections between them The operation can be performed in D Sub mode only by command line described in Section 6 3 12 or by GUI which will be introduced in detailed here instead...

Страница 32: ...a their own USB cable and setting them up in the software GUI or using command lines Once the configuration is done only one USB cable connecting to the Main device is needed to control the entire chain 5 3 2 Set Device ID and Connect Before setting up the daisy chain make sure all units connecting to the chain are working in the same mode either in SMC mode or D Sub mode Then power on a unit with...

Страница 33: ... the second device from the daisy chain to PC via USB and set it to secondary 1 in the option menu Figure 5 13 Set up Secondary Device Repeat this process for all the secondary units that need to be connected Please note that for any secondary devices once a device s ID is set in the option menu the USB can be disconnected ...

Страница 34: ...e and Start Daisy Chain Select the Main device and Click Daisy Chain Connect on the buttom left corner Then the below window will show Figure 5 15 Select Secondary Devices to Run Select the secondaries to run in this case only secondary 1 is selected Then close the current window to access the new daisy chain GUI ...

Страница 35: ...n Daisy Chain 5 3 3 Daisy Chain Operations The operations are similar as the single device operations except that there is a new Sync function in the main menu as shown below Figure 5 18 Sync Button in the Main Menu of Daisy Chain Operation The Sync function here is used for all devices to synchronize all motions including Jog and Move to be executed in the same time The Jog and Move buttons on th...

Страница 36: ... are not in the same loop 5 4 Raster Scan Operation The user may want two stages to move in conjection with each other not just moving at the same time An example of an operationwhere signals trigger each other and the stages move one after another called a Raster Scan is described below 5 4 1 Physical Connections PDXC Device 1 Trig In Trig Out GND PDXC Device 2 GND Trig Out Trig In I O cable I O ...

Страница 37: ...h the USB cables of the devices to the PC and open two different instances of the software GUI one for each device Figure 5 21 Two GUI Instances for Raster Scan Home all the devices before any other operations the Home logo should turn green if successful Then switch both to closed loop operation and then switch both to Trigger Mode on the upper right corner of GUI ...

Страница 38: ...e example bellow to be Fixed Positions mode defining the two positions with their own edge type 5 mm in rising edge for Pos1 and 5 mm in rising edge for Pos2 in this example With all these settings done press the Move or Jog Step button in closed loop operation which will start this Scan motion The operation will run until one device runs out of range it will stop automatically During this scan yo...

Страница 39: ...nt separated by a space character The query structure is as follows Keyword CR where keyword defines the function and the question mark indicates a query The string is terminated with a carriage return CR There are a few exceptions to this which are noted below The following table lists the commands and queries available with this device as well as unique shortcut keys The prompt symbol appears af...

Страница 40: ... memory 18 Erase all PID Value Stored in Flash and Return to Initial Value ERA x Where x 1 means erase all PID value other values not defined 19 Get Homing Status HOM Returns YES when Home complete NO when not 20 Require to HOME HOM 1 Calibrate the QDEC counter after power up 21 Get Target Position TPOS Returns the target position in unit of mm which is calculated based on Analog In Gain and Analo...

Страница 41: ...when disabled 30 Set Abnormal Move Detection AMD x Switches the abnormal move detection on or off default is on Used to detect stage stuck or move by external force where x 1 means Enable Detection while x 0 means Disable Detection 31 Get Loop Status LP Returns 1 when open loop 0 when closed loop 32 Switch Between Closed Loop and Open Loop by Command LP x Where x 1 means open loop default while x ...

Страница 42: ...t be used in pair with SPR x 50 Switch Output Between SMC and D Sub SW x Where x 0 means drive D Sub port while x 1 means drive SMC port Note that this command needs time to execute 1 second at least 51 Get Current Status of Output SW Returns 0 for D Sub port 1 for SMC port 52 Move Stage Forward for Specific Pulses MOVF x y Where x stands for No of pulses x ranges from 1 to 65535 while y stands fo...

Страница 43: ...rs 6 3 2 SN2 Serial Number of Stage Queries the serial number of the stage Return xxxxxxxxPDxxx where the length of PDxxx is variable it can be PDX1 or PDX1 M or PDXR1 etc 6 3 3 FV Version Number of PDXC Queries the version number of the PDXC device Return x x x x x x where two version number strings are separated by a comma 6 3 4 POS x POS Position Command POS command is used to set desired posit...

Страница 44: ...ent set frequency of driving Return xxxx 6 3 7 FRQ2 x FRQ2 Frequency Command FRQ command is used to set the desired frequency of CH2 in SMC mode that the device will drive the range is from 800 to 20000 FRQ2 x Sets the target frequency of the stage to move FRQ2 Queries the current set frequency of driving Return xxxx 6 3 8 Kn x Kn PID Command Kn command is used to set new PID values where n p stan...

Страница 45: ...r No Where yes means home completed while No means it is not 6 3 11 TPOS Target Position Query TPOS command is used to query target position when in external trigger mode whose signal Analog In reflects the value TPOS Return xx xx Where the result has only two digits of decimal 6 3 12 DCS x DCS Daisy Chain Entry Command DCS command is used to enter or exit into the daisy chain mode of the device D...

Страница 46: ...that each query command should only contain one device due to physical limitation of shared bus of the daisy chain structure Return xxxxxxxxx Where only the same chain ID Secondary x here will respond to this query command 6 3 14 ETM x ETM ETMALL Daisy Chain Command ETM command is used to enter or exit external trigger mode of the device ETM xx or xx n or xx M xx n Sets the device to desired exter...

Страница 47: ...d is used to enable disable the detection of abnormal move AMD n Sets to enable the detection of abnormal move when n 1 disable when n 0 AMD Queries the status of abnormal detection Return n Where the result is the same as the value set above 6 3 17 LP n LP Loop Control LP command is used to switch loop states manually LP n Switch to closed loop when n 0 open loop when n 1 LP Queries the status of...

Страница 48: ...ommand Not Defined n 2 Data Out of Range n 3 Failed to Execute Last Command n 4 No Waveform Data Loaded n 5 Need Home First n 6 Device Works in Wrong Mode n 7 Stage Move Abnormal n 8 Over Current n 9 Over Temperature n 10 Wrong Stage Detected 6 3 21 ING x INO x OUG x OUO x ING INO OUG OUO External Gain and Offset Set These commands are used to set Gain and Offset values for Analog In and Analog Ou...

Страница 49: ... n Where the result is the same as the value set above 6 3 24 MOVF x y MOVB x y Move Stage in Open Loop MOVF or MOVB command is used to move the stage forward or backward for specific steps defined by x The parameter y is only useful in SMC mode where y 0 means channel 1 y 1 means channel 2 other values mean both channels MOVF x y or MOVB x y Move forward or backward for steps of x and y 6 3 25 SP...

Страница 50: ...nt flash SAVEALL n Save the parameters to flash when n 1 erase them when n 0 SAVEALL Queries the status of saving Return n Where the result is the same as the value set above 6 3 27 DIS n DIS DEVICE DISABLE DIS command is used to disable enable the device DIS n Disable the device when n 1 enable it when n 0 DIS Queries the status of device Return n Where the result is the same as the value set abo...

Страница 51: ... unit and disconnect power cord before operating a fuse replacement The fuse is located in the fuse drawer below the power inlet To replace the fuse press the two clips on the drawer and pull it out as shown in Figure 7 1 Figure 7 1 Fuse Replacement Take out the used fuses and put in new ones Please use a 3 15 A 250 VAC Type T slow blow fuses only ...

Страница 52: ...ORIC Piezo Stage Controller PDXC Chapter 8 Mechanical Drawing Rev B September 23 2021 Page 49 Chapter 8 Mechanical Drawing ...

Страница 53: ...ency 20 kHz Max D Sub Port Voltage 10 to 50 V Frequency 20 kHz Max Max Current Limit 10 A Front USB Type A USB Host 2 0 Back USB Type B USB Device 2 0 Voltage of Analog In Out 10 to 10 V 2 Voltage of Trigger In Out 0 to 5 V TTL Dimensions L x W x H 314 2 mm x 150 0 mm x 83 7 mm 12 37 x 5 91 x 3 30 Weight 5 kg Operating Temperature 10 35 Input Power 100 240 VAC 50 60 Hz ...

Страница 54: ...further information Waste Treatment is Your Own Responsibility If you do not return an end of life unit to Thorlabs you must hand it to a company specialized in waste recovery Do not dispose of the unit in a litter bin or at a public waste disposal site Ecological Background It is well known that WEEE pollutes the environment by releasing toxic products during decomposition The aim of the European...

Страница 55: ...ORIC Piezo Stage Controller PDXC Chapter 10 Regulatory Page 52 CTN015391 D02 10 2 CE Certificate ...

Страница 56: ...ORIC Piezo Stage Controller PDXC Chapter 10 Regulatory Rev B September 23 2021 Page 53 ...

Страница 57: ...ation USA Canada and South America Thorlabs Inc sales thorlabs com techsupport thorlabs com UK and Ireland Thorlabs Ltd sales uk thorlabs com techsupport uk thorlabs com Europe Thorlabs GmbH europe thorlabs com Scandinavia Thorlabs Sweden AB scandinavia thorlabs com France Thorlabs SAS sales fr thorlabs com Brazil Thorlabs Vendas de Fotônicos Ltda brasil thorlabs com Japan Thorlabs Japan Inc sales...

Страница 58: ...www thorlabs com ...

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