0101-8603-0, Rev. F
i
FC/BCD-2800 F & I Guide
TABLE OF CONTENTS
Section
Page
Table of Contents......................................................................................... i
Safety Instructions for Operating and Service Personnel ............................ iii
Special Amendment for U.K. Users: Electrical Safety Precautions ............. iv
User Responsibility.......................................................................................v
Guidelines and Good Practices ....................................................................v
Health Hazard ............................................................................................. vi
1
INTRODUCTION AND SITE PREPARATION CHECKLIST
1.1
Scope and Purpose of this Guide............................................................... 1-1
1.2 Temescal
Contact
information.................................................................... 1-1
1.3
General Safety Information......................................................................... 1-2
1.4
Site Preparation Checklist .......................................................................... 1-2
2 FACILITY
REQUIREMENTS
2.1 Environment ............................................................................................... 2-1
2.2 Water ......................................................................................................... 2-1
2.3 Compressed
Gases.................................................................................... 2-2
2.4 Electrical
Power Requirements .................................................................. 2-3
2.5 Electrical
Grounding Requirements ............................................................ 2-3
3
UNPACKING and INSTALLATION
3.1
Unpacking by Customer ..............................................................................3-1
3.2
Customer’s Site Preparation Responsibilities..............................................3-2
3.3
Temescal Installation Responsibilities .........................................................3-5
3.4
Installation Drawings ................................................................................... 3-6
LIST OF ILLUSTRATIONS
Fig. Number
Page
2-1 Facility and System Grounding Requirements ................................................................................... 2-4
2-2
Low-Z Grounding Requirements for the E-Beam Power Supply......................................................... 2-5
3-1
Vacuum Cubicle Height and Width ..................................................................................................... 3-6
3-2
System Plan View, Showing Dimensions of Major Components ........................................................ 3-7
3-3
Mounting Hole Locations for System Power Distribution Box ............................................................. 3-8
3-4
Vacuum Cubicle Footprint, Showing Precise Locations of Casters, Leveling Feet, and
Seismic Brackets ................................................................................................................................ 3-9
3-5
Utility Connection Points on Rear of Vacuum Cubicle ...................................................................... 3-10
3-6
Routing of Customer Supplied Utility Lines in 208-V Installations .................................................... 3-11
3-7
Routing of Customer Supplied Utility Lines in 400-V Installations .................................................... 3-12
3-8
Routing of Helium Lines (Temescal Supplied) .................................................................................. 3-13
3-9
Routing of EMO Cables and Copper Grounding Straps (Temescal Supplied).................................. 3-14
3-10 Routing of Power and Control/Data Cables (Temescal Supplied) .................................................... 3-15
