Section 3: Unpacking and Installation
FC/BCD-2800 Facility and Installation Guide
FC/BCD-2800 F & I Guide
3-4
0101-8603-0, Rev. F
3.2.6 Installing the Mechanical Pump
With the vacuum cubicle in place and leveled within specifications, install the mechanical
pump (with blower, if this option is included in your system) and install and connect the
roughing line and the mechanical pump exhaust. To do so:
1. Loosen the clamps connecting the flexible hose to the mechanical pump.
2. Release the bolts that hold the mechanical pump to the system frame during
shipment, allowing the pump to rest on the floor.
3. Retighten the clamps on the flexible hose to isolate the vacuum cubicle from the
pump’s vibration.
4. Remove the blank flange from the roughing port.
5. Install the roughing pump and blower, if included in the system.
6. Check the oil level in the mechanical pump and the blower, if any.
Note: Electrical connections to the mechanical pump must be made by the Temescal
service representative.
3.2.7
Making Service Connections
The customer is responsible for providing the utility lines specified below and for
connecting these lines at the facility end. The customer may lay out these service lines
(see Figures 3-6 and 3-7) so they are properly routed all the way to their connection
points at the system (see Figure 3-5). However, service connections to the system may
be made only by or under the supervision of a Temescal service representative, unless
the customer has made specific arrangements to the contrary.
Water:
Cold water supply #1: Vacuum cubicle water
Cold water supply #2: Cryopump compressor
Cold water supply #3: Required only on systems with water-cooled mechanical
pumps
Optional hot water supply for vacuum cubicle
Compressed Gases (supplied to vacuum cubicle):
Vent gases (CDA or N
2
)
Pneumatic air
Optional process gases
Exhaust Gases:
Vacuum cubicle to facility exhaust
Mechanical pump to facility exhaust
Electrical Connections:
In 208-V installations, connect Power Drops #1 and #2 to the power distribution
box. In 400-V installations, connect Drop #1 to the step-down transformer and
Drop #2 to the power distribution box.
NOTICE
Equipment power connections and pump rotation checks shall be
performed only by or under the supervision of an on-site Temescal
service representative. Please refer to the terms of your warranty.
