FC/BCD-2800 Facility and Installation Guide
Section 1: Introduction and Site Prep. Checklist
0101-8603-0, Rev. F
1-5
FC/BCD-2800 F & I Guide
Table 1-1 Length of Control/Data Cables (see Figure 3-10)
Cable
Description
Required
Length
Vacuum cubicle to cryopump compressor
Vacuum cubicle to operator station
20 ft.*
*Std. cable of fixed length. Custom cables of other lengths can be quoted.
Table 1-2 Length of Utility Power Cables (see Figure 3-10)
Cable
Description
Required
Length
PD Box to cryopump compressor
PD Box to vacuum cubicle
Table 1-3 Length of Bundled Power and Control/Data Cables (see Figure 3-10)
Cable
Description
Required
Length
PD box to Operator station
PD Box to mechanical pump
Length of 3”-wide copper grounding strap required to connect vacuum cubicle to facility’s
RF grounding point (see Figures 2-1 and 2-2): __ ft.
Length of helium lines connecting vacuum cubicle to cryopump compressor (see Figure
3-8): __ ft.
Customer: _________________________________________ Date: ____________
Company: ________________________________ System Number: ____________
