manualshive.com logo in svg

Temescal BCD-2800, Руководство по установке и эксплуатации

Поделиться
Скачать
Temescal BCD-2800 Скачать руководство пользователя страница 22

Section 2:  Facility Requirements

FC/BCD-2800 Facility and Installation Guide

FC/BCD-2800 F & I Guide

2-6

0101-8603-0, Rev. F

  The base of the source and the surface on which it is mounted (usually the upper

surface of the source tray) must be clean and free of evaporated material.

  The mounting surface must be made of nonmagnetic material.

  The source must be securely bolted to the mounting surface.

  Inside the vacuum cubicle

  Inside the right-hand door of the operator station

2.5.2

Grounding Hooks

Grounding hooks are provided inside the vacuum cubicle and inside the right-hand door
of the operator station.

Содержание BCD-2800

Страница 1: ...INSTALLATION GUIDE FOR FC BCD 2800 EVAPORATION SYSTEMS Temescal a division of Ferrotec USA Corporation 4569 C Las Positas Road Livermore CA 94551 Tel 1 800 522 1215 Fax 925 449 4096 0101 8603 0 Revision F March 2011 ...

Страница 2: ...ons for CV 16SLX and CV 12SL power supplies Added Figs 3 3 and 3 4 updated Fig 3 5 and deleted former Figs 3 7 through 3 12 Phase out of Simba 2 power supply Received updated Engineering info regarding current specifi cations for CV 6SLX and CV 12 SL power supplies Aug 2009 CK D In sections 1 4 and 2 5 corrected values for power drops to be provided for vacuum system and e beam power supply Update...

Страница 3: ...n Responsibilities 3 2 3 3 Temescal Installation Responsibilities 3 5 3 4 Installation Drawings 3 6 LIST OF ILLUSTRATIONS Fig Number Page 2 1 Facility and System Grounding Requirements 2 4 2 2 Low Z Grounding Requirements for the E Beam Power Supply 2 5 3 1 Vacuum Cubicle Height and Width 3 6 3 2 System Plan View Showing Dimensions of Major Components 3 7 3 3 Mounting Hole Locations for System Pow...

Страница 4: ...FC BCD 2800 F I Guide 0101 8603 0 Rev F ii This page has been intentionally left blank for pagination purposes ...

Страница 5: ...he local electrical codes Refer to the power supply portion of the documentation to determine the proper electrical ground for high voltage components 6 Before servicing any high voltage component switch off the electrical power at the component s main power switch This switch should have a lockout feature Lock the power off and keep the key with you while you are working on the equipment 7 Certai...

Страница 6: ...e vacuum system and the high voltage power supply Screens protecting extra high voltage conductors should be removed only if appropriate action has been taken to ensure that extra high voltage conductors are dead and cannot be reenergized inadvertently In addition all personnel should be aware of 1 The Electricity Factories Act Special Regulations 1908 and 1944 in particular Regulations 18 d and 2...

Страница 7: ... not expose the vent and purge valves to excessive pressures The nitrogen line regulator is factory set at 15 psi and must not be adjusted above 20 psi 3 Prevent oil grease water sweat etc from getting into the vacuum chamber 4 Replace the source tray shield correctly to ensure that the ceramic parts or the high voltage feedthroughs are protected from being coated 5 Clean all mechanical parts and ...

Страница 8: ...al Safety Data Sheet s covering the evaporant s in question c Certain powders titanium for instance can cause flash fires when exposed to oxygen or other oxidizers Therefore when opening the chamber door after a deposition cycle exercise extreme caution and allow time for the coating surface to oxidize Breakage of some of the more reactive condensates may be hazardous even when the above precautio...

Страница 9: ...anual YES NO If YES typographical or technical please cite the pages ____________________________________________________________________ 4 How important was this F I Guide in preparing for your system circle one Essential Important Nice to Have Not Important 5 Do you currently own and operate any other Temescal Systems YES NO please specify ______________________________________________________ 6...

Страница 10: ...FC BCD 2800 F I Guide viii 0101 8603 0 Rev F This page has been intentionally left blank for pagination purposes ...

Страница 11: ...Section 3 Unpacking and Installation 1 1 2 In This Section This remainder of this section contains 1 2 Temescal Contact Information 1 3 General Safety Information 1 4 Site Preparation Checklist 1 2 Temescal Contact Information If you have any questions or concerns or if you need assistance contact us at one of the following telephone numbers To schedule an installation or a field service visit cal...

Страница 12: ...AND WARNINGS AND COMPLY WITH THEIR GUIDELINES 1 4 Site Preparation Checklist The customer is responsible for providing properly rated power water air and gases services to their appropriate termination points at the System prior to installation Specific requirements and installation specifications required for each system are detailed in this Facilities and Installation F I Guide The customer is a...

Страница 13: ...Water Supply 1 Vacuum Cubicle Max inlet pressure 100 psig 6 89 bar Min delta pressure 50 psig 3 45 bar Inlet temperature 50º 70º F 10º 21º C Filtered to 50 microns Flow Rate Requirements Chamber walls and doors 5 gpm 18 9 L min Each e beam source 2 75 to 5 0 gpm 11 4 to 18 9 L min Each crystal monitor 0 5 gpm 1 9 L min Cold Water Supply 2 Cryopump Compressor Min max inlet pressure 30 100 psig 2 07...

Страница 14: ...3 phase wye 5 wire with neutral 20 A 208 V CV 12SLX 208 VAC 50 60 Hz 3 phase delta 4 wire 50 A 400 V CV 12SLX 400 VAC 50 60 Hz 3 phase wye 5 wire with neutral 30 A Ground System requires good earth ground low impedance to RF as well as DC currents For illustrations and additional details see section 2 5 Site Preparation and Installation Instructions Section 3 of this F I Guide has been read and un...

Страница 15: ...re 3 10 Cable Description Required Length PD Box to cryopump compressor PD Box to vacuum cubicle Table 1 3 Length of Bundled Power and Control Data Cables see Figure 3 10 Cable Description Required Length PD box to Operator station PD Box to mechanical pump Length of 3 wide copper grounding strap required to connect vacuum cubicle to facility s RF grounding point see Figures 2 1 and 2 2 __ ft Leng...

Страница 16: ...on 1 Introduction and Site Prep Checklist FC BCD 2800 Facility and Installation Guide FC BCD 2800 F I Guide 1 6 0101 8603 0 Rev F This page has been intentionally left blank for hard copy pagination purposes ...

Страница 17: ...n must be completed and the Site Preparation Checklist see Section 1 4 must be completed and returned to Temescal 2 1 Environment Ambient Air Temperature 55º F to 90º F 12º C to 32º C Relative Humidity 50 maximum must be free of corrosive fumes and vapors Air Conditioning Capable of 5 kW cooling 2 2 Water Both cold and hot water must be filtered to 50 microns In addition the water supplied to the ...

Страница 18: ...irements Edwards Model iGX100 0 3 gpm 1 1 L min Edwards Model iGX3 100 0 6 gpm 2 2 L min For water requirements for mech pumps other than those supplied by Temescal consult the manufacturer of the pump in question 2 2 2 Optional Hot Water Flow rate 5 gpm 18 9 L min Max inlet pressure 90 psig 6 21 bar Min delta pressure 50 psig 3 45 bar Approximate temperature 140º F 60º C Filtered to 50 microns No...

Страница 19: ...t be connected to that of any other system or equipment Figure 2 1 illustrates the required facility and system grounding requirements Two 8 foot 2 44 meter copper clad steel rods of inch 20 mm diameter should be driven into the earth as near as possible to the vacuum cubicle These rods should be approximately 6 feet 1 85 meters apart After they are driven into the ground the resistance between th...

Страница 20: ... 0101 8603 0 Rev F CAUTION Do not use braided wire for any ground connections CAUTION Do not rely on water pipes to establish the system ground connection Multiple plumbing joints each with tape and or sealing compounds make such a ground unreliable Figure 2 1 Facility and System Grounding Requirements ...

Страница 21: ...irements for the E Beam Power Supply Where copper straps are attached to frame members the copper must be bolted to clean bare patches of metal The length of copper strap connected to the source tray must be securely bolted to a clean site on that part The upper grounding stud on the FPS module must be connected to the vacuum cubicle s central low Z grounding point by a length of 1 2 wide copper s...

Страница 22: ...r surface of the source tray must be clean and free of evaporated material The mounting surface must be made of nonmagnetic material The source must be securely bolted to the mounting surface Inside the vacuum cubicle Inside the right hand door of the operator station 2 5 2 Grounding Hooks Grounding hooks are provided inside the vacuum cubicle and inside the right hand door of the operator station...

Страница 23: ...at the contents of the shipment be examined carefully when it is unpacked to make sure that no damage has occurred in transit First check the materials received against the packing list to be certain that all elements are accounted for Then check each component for damage Normally the major components of the system as shipped will be Vacuum cubicle Operator station Power distribution box Mechanica...

Страница 24: ...rs with their tools will be required to install the system 1 Mechanical technicians or movers will remove any bracing and shipping hardware 2 Movers will place the vacuum cubicle in its permanent position and level it 3 An electrician will install service Drops 1 and 2 and connect both service drops to the power distribution box The electrician will also establish the grounding points for the requ...

Страница 25: ...loor to the bottom of the box is 32 inches 815 mm Figure 3 3 shows the PDB s dimensions and its mounting hole locations Mounting hardware for the PDB is customer supplied On systems supplied with 208 V ac power the PDB will weigh approximately 176 lbs 80 kg On systems supplied with 400 V ac power a transformer will be included in the PBD increasing its weight to approximately 300 lbs 136 kg Such s...

Страница 26: ...the utility lines specified below and for connecting these lines at the facility end The customer may lay out these service lines see Figures 3 6 and 3 7 so they are properly routed all the way to their connection points at the system see Figure 3 5 However service connections to the system may be made only by or under the supervision of a Temescal service representative unless the customer has ma...

Страница 27: ...yopump Installation and Maintenance Instructions Helix document 8040491 Revision 102 dated 2 3 04 Helium recharging and decontamination procedures must be performed in strict accordance with the instructions in Chapter 4 of that manual 3 3 2 Making the Remaining Service Connections An authorized Temescal field service technician must make the connections specified below For approximate line routin...

Страница 28: ...1 terminals to verify that the required voltages are being supplied to the system see the vacuum cubicle wiring diagram 4 The correct direction for the pump s rotation is indicated by an arrow on the pump Check its rotation direction by briefly switching on the pump s circuit breaker If the pump is turning the wrong way interchange any two hot lines at the pump motor Switch the pump on again brief...

Страница 29: ...FC BCD 2800 Facility and Installation Guide Section 3 Unpacking and Installation 0101 8603 0 Rev F 3 7 FC BCD 2800 F I Guide Figure 3 2 System Plan View Showing Dimensions of Major Components ...

Страница 30: ...uide 3 8 0101 8603 0 Rev F Figure 3 3 Mounting Hole Locations for System Power Distribution Box 29 9212 in 760 00 mm 31 4961 in 800 00 mm 37 7952 in 960 00 mm 39 3701 in 1000 00 mm x4 0 3720 in 9 45 mm Mounting hole through SYSTEM MAIN ON RESET 31 50 in 29 92 in 39 37 in 37 80 in x4 0 375 in 9 5 mm ...

Страница 31: ...ility and Installation Guide Section 3 Unpacking and Installation 0101 8603 0 Rev F 3 9 FC BCD 2800 F I Guide Figure 3 4 Vacuum Cubicle Footprint Showing Precise Locations of Casters Leveling Feet and Seismic Brackets ...

Страница 32: ...as 2 Pass throughs for cryo pressure Helium lines Extra hole Vacuum line to mechanical pump 104 1 4 1 333 4 13 1 260 4 10 3 166 4 6 6 233 9 2 50 8 2 0 0 0 25 4 1 0 90 5 3 6 154 6 1 208 8 2 249 2 9 8 312 7 12 3 439 7 17 3 376 2 14 8 736 6 29 0 3 8 Compression 1 4 FPT 3 4 NPT 1 1 4 NPT 898 5 35 4 Optional external RGA port Rout elect rical cables under vacuum cubicle as necessary NOTE Chamber cryopu...

Страница 33: ...FC BCD 2800 Facility and Installation Guide Section 3 Unpacking and Installation 0101 8603 0 Rev F 3 11 FC BCD 2800 F I Guide Figure 3 6 Routing of Customer Supplied Utility Lines in 208 V Installations ...

Страница 34: ...Section 3 Unpacking and Installation FC BCD 2800 Facility and Installation Guide FC BCD 2800 F I Guide 3 12 0101 8603 0 Rev F Figure 3 7 Routing of Customer Supplied Utility Lines in 400 V Installations ...

Страница 35: ...FC BCD 2800 Facility and Installation Guide Section 3 Unpacking and Installation 0101 8603 0 Rev F 3 13 FC BCD 2800 F I Guide Figure 3 8 Routing of Helium Lines Temescal Supplied ...

Страница 36: ...ection 3 Unpacking and Installation FC BCD 2800 Facility and Installation Guide FC BCD 2800 F I Guide 3 14 0101 8603 0 Rev F Figure 3 9 Routing of EMO Cables and Copper Grounding Straps Temescal Supplied ...

Страница 37: ...FC BCD 2800 Facility and Installation Guide Section 3 Unpacking and Installation 0101 8603 0 Rev F 3 15 FC BCD 2800 F I Guide Figure 3 10 Routing of Power and Control Data Cables Temescal Supplied ...

Страница 38: ...Section 3 Unpacking and Installation FC BCD 2800 Facility and Installation Guide FC BCD 2800 F I Guide 3 16 0101 8603 0 Rev F ...

Отзывы:

Нет отзывов

Бренды по названию

Популярные бренды

Загрузить еще бренды