0101-8603-0, Rev. F
3-1
FC/BCD-2800 F & I Guide
3 Unpacking and Installation
This section provides information and guidance about what to do with your new system
when it has arrived on site, but prior to installation.
The customer is responsible for unpacking and preparing the site, as outlined in
sections 3.1 and 3.2.
Temescal is responsible for making equipment interconnections and for energizing
and testing the equipment prior to acceptance, as described in section 3.3.
This section contains the following subsections:
3.1 Unpacking by Customer
3.2 Customer Site Preparation Responsibilities
3.3 Temescal Installation Responsibilities
3.4 Installation
Drawings
3.1
Unpacking by Customer
3.1.1 Uncrating
The equipment described in this F& I Guide and listed in the shipping documents was
released to the carrier in good condition and properly packed. It is essential to all
concerned that the contents of the shipment be examined carefully when it is unpacked,
to make sure that no damage has occurred in transit. First check the materials received
against the packing list to be certain that all elements are accounted for. Then check
each component for damage.
Normally, the major components of the system as shipped will be:
Vacuum cubicle
Operator station
Power distribution box
Mechanical (i.e., roughing) pump
Cryopump compressor
Optional blower pump
Other accessories as specified
CAUTION
Many smaller items are packed separately, as indicated on your packing list. These
items may include ionization gauge tubes, cables, substrate carrier, piping, and
fittings.
In discarding packing materials, take care to avoid losing any such parts. Wait
to discard packing materials until after the initial system startup procedure.
WARNING
The system is shipped under vacuum. On delivery, verify that it is still under vacuum
by attempting to open the vacuum chamber door. If the door can be opened easily,
there is no vacuum. If that is the case, it is highly likely that some damage has
occurred.
