Section 2: Facility Requirements
FC/BCD-2800 Facility and Installation Guide
FC/BCD-2800 F & I Guide
2-2
0101-8603-0, Rev. F
Cold Water Supply #1 (vacuum cubicle)
Maximum inlet pressure
100 psig (6.21 bar)
Minimum delta pressure
50 psig (3.45 bar)
Inlet temperature
50°–70º F (10º–21º C)
Filtered to 50 microns
Flow Rate Requirements
Chamber walls and doors
5 gpm (18.9 L/min)
Each e-beam source
2.75 to 5 gpm (11.4 to 18.9 L/min)
Each crystal monitor
0.5 gpm (1.9 L/min.)
Cold Water Supply #2 (cryopump compressor)
Min./max. inlet pressure
30/100 psig (2.07/6.89 bar)
Inlet temperature
10º–30º C
Min. flow rate
CTI 8200 cryopump
1.50 gpm (5.7 L/min.)
CTI 9600 cryopump
2.75 gpm (10.4 L/min.)
Cold Water Supply #3
For Edwards Model iGX100 and iGX3/100 pumps:
Min./max. inlet pressure
40/100 psig (2.77/6.89 bar)
Inlet temperature
10º–30º C
Min. flow rate requirements
Edwards Model iGX100
0.3 gpm (1.1 L/min.)
Edwards Model iGX3/100
0.6 gpm (2.2 L/min.)
For water requirements for mech. pumps other than those supplied by
Temescal, consult the manufacturer of the pump in question.
2.2.2
Optional Hot Water
Flow rate
5 gpm (18.9 L/min)
Max. inlet pressure
90 psig (6.21 bar)
Min. delta pressure
50 psig (3.45 bar)
Approximate temperature
140º F (60º C)
Filtered to 50 microns
Note: Hot water must not be hot enough to cause scalding or burning to the
touch.
2.3 Compressed
Gases
2.3.1
Vent Gas (for process and/or purging): Clean Dry Air (CDA) or Dry Nitrogen (N
2
)
60 to 120 psig (4.14 to 8.27 bar)
2.3.2
Compressed air (oil free) for activation of valves: 90 to 120 psig (6.21 to 8.27 bar)
Note: Pneumatics air pressure must be at least 10 psi greater than
max. hot or cold water pressure.
2.3.3
Helium: One bottle, 99.999% pure (For additional details, see section 3.3.1.)
2.3.4
Optional Process Gas: Argon (99.99% minimum purity)
1 to 4 sccm, for FC ion beam source without PBN, or
3 to 7 sccm, for FC ion beam source with PBN
