FC/BCD-2800 Facility and Installation Guide
Section 2: Facility Requirements
0101-8603-0, Rev. F
2-5
FC/BCD-2800 F & I Guide
2.5.3
Low-Impedance Ground for the E-Beam Power Supply
Figure 2-2 illustrates the low-impedance grounding scheme required for the e-beam
power supply. As that illustration shows, 1/2”-wide copper straps must connect:
the grounding stud on the rear of the power module to a grounding point on
the frame of the operator station
the operator station’s grounding point to the main grounding point in the
vacuum cubicle
the filament power supply to the vacuum cubicle’s main grounding point.
Figure 2-2 Low-Z Grounding Requirements for the E-Beam Power Supply
Where copper straps are attached to frame members, the copper must be bolted to
clean, bare patches of metal. The length of copper strap connected to the source tray
must be securely bolted to a clean site on that part. The upper grounding stud on the
FPS module must be connected to the vacuum cubicle’s central low-Z grounding point by
a length of 1/2”-wide copper strap (thickness: 0.035”–0.050”). The green #10 AWG wire
grounds the lower FPS grounding stud to the vacuum cubicle’s frame.
The high-voltage cable connecting the power module to the filament power supply is
adequately grounded when the coaxial cable is plugged into the filament power supply.
2.5.4
Electron Beam Source Ground
To ensure a good ground between the electron beam source and the vacuum cubicle, the
following conditions must be met:
