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Figure 3-43 Dialog box of 3D scan parameters for 3D Scan
EM Start WL
Start EM wavelength of 3D scan can be input from 200nm to 900nm with a minimum step
size of 0.2nm, the start wavelength must be less than the end wavelength at least 1nm.
EM End WL
End EM wavelength of 3D scan can be input from 200nm to 900nm with a minimum step
size of 0.2nm, the end wavelength must be more than the start wavelength at least 1nm.
EX Start WL
Start EX wavelength of 3D scan can be input from 200nm to 900nm with a minimum step
size of 0.2nm, the start wavelength must be less than the end wavelength at least 1nm.
EX End WL
End EX wavelength of 3D scan can be input from 200nm to 900nm with a minimum step
size of 0.2nm, the end wavelength must be more than the start wavelength at least 1nm.
Speed
Speed of wavelength scan: 30, 60, 240, 1200, 2400 and 30000nm/min.
Interval
Data interval of 3D scan: 0.2, 1.0, 2.0, 3.0, 5.0, 10.0nm
4)
Data Processing
As shown in Figure 3-44, the parameters that are necessary for judging peak and valley
are described as follows:
Threshold
When the difference value between peak and valley is more than this value which the peak
valley can be judged. Recommend value is 5.
Sensitivity
The number required of the data points between peak and valley which the peak valley can
be judged. Recommend value is 6.