Status
Pro
–
µLine F1 User Manual
11
COMPONENTS
4.1 Required Components
The following components are needed in order to measure an accurate positioning with
the Interferometer µLine:
Sets may vary according to whichever system package you have ordered. All necessary
components are included in the standard package. Additional components come with
more advanced sets. Please check with your delivery order!
Laser interferometer
(BG 840200)
4 Components
Adapter
(BT 840220)
Temperature sensors
(BT 840290)
Interferometer element IL1
(BT 840270)
Reflector element RL1
(BT 840280)