SCS LABCOTER 2, Руководство оператора

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Rev 37 Operator’s Manual OM-610-1002-1
page 22 SECTION 5 OPERATION PDS-2010
Power
If main power is applied, the white Main Power pushbutton light will illuminate. To energize the machine,
depress the white Main Power pushbutton light. This will initialize the computer for operation and power the
process controllers.
5.5 PROCESS CONTROLLERS
A copy of the "Installation and Operation" Manual for the WEST 6100+ controller is included in Section 6.
The discussion here is limited to the settings and indications of each controller as they relate to the process.
When a controller comes on, the digital display indicates the present process value (SP lower display) and the
present value (upper display). To change the displayed parameter, refer to Section 6.4.
5.5.1 Furnace Temperature Controller
The furnace controller displays and controls the temperature of the pyrolysis tube heater. The furnace set point
is 690°C for Parylene C dimer. Other types of dimer may require different settings. The output ‘1’ at the upper
right corner of the lower display light is on when the furnace is cycling heat. It will be on continuously during
warm-up and begin to cycle when it nears set point. A 20°C deviation from the set point either high or low
will trigger the red alarm (ALM) light.
The alarm indicator must be off as one of the preconditions before the vaporizer can be enabled. If the red
alarm light comes on for at least 20 seconds after the furnace has reached its operating range, the fault alarm
detection sequence will be initiated.
5.5.2 Chamber Gauge Temperature Controller
The chamber gauge controller displays and controls the temperature of the vacuum gauge tube. The gauge
tube heater set point is 135°C and should not be changed. Higher settings could damage the sensor and lower
settings could permit Parylene formation on the sensor elements. The indicators operate as described for the
furnace, with the output ‘1’ light indicating heat cycling and the alarm (ALM) light indicating a high or low
10°C deviation from set point.
The alarm indicators must be off as one of the preconditions before the vaporizer can be enabled. If the ALM
light comes on for at least 20 seconds after the chamber gauge has reached its operating range, the fault alarm
sequence will be initiated.
5.5.3 Vacuum Pressure Controller
The vacuum controller displays a process value indicating the degree of vacuum in the system and keeps the
chamber pressure within the set points by controlling the vaporizer temperature. The chamber pressure
transducer used on the 2010 provides a non-linear voltage input to the vacuum controller. To provide for
optimum coating process control, the span and offset parameters of the vacuum process controller have been
configured to display a value that very nearly represents absolute pressure (in milliTorr) for the process range
of 10 to 100 units. As the pressure in the chamber rises above this range, the display reading is increasingly
lower than actual milliTorr values. For example, when the display reads 500 units, the actual pressure in the
chamber is approximately 2.2 Torr (2200 milliTorr).