SCS LABCOTER 2, Руководство оператора

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OM-610-1002-1 Operator’s Manual Rev 37
PDS-2010 SECTION 6 MAINTENANCE page
39
NOTE: The system base pressure should be regularly monitored. Increases not attributed to vacuum leaks
or outgassing usually indicate a deterioration of the pumping system. Deterioration is usually due to the
passage of process by-products that are not effectively trapped by the cold trap probe. In some instances,
lower cold trap temperatures will alleviate this condition. Normally, the lower system base pressures can
be restored by cleaning the inlet screen at the pump inlet and/or changing the pump oil.
6.1.6 Vacuum Gauge Port
The vacuum gauge is heated to 135°C to protect it from Parylene build-up. However, the small port in the
chamber base to which the gauge is connected is subject to build-up. This port should be regularly inspected
and stripped because polymer build-up could interfere with the vacuum readings.
6.1.7 Vaporizer
The vaporizer and load door are subject to build-up of Parylene dimer film and ash. These areas should be
cleaned whenever a build-up is noted in order to prevent coating contamination.
6.2 LONG TERM INSPECTIONS AND MAINTENANCE
The regularity of these inspections and maintenance is dependent on the amount of use and dimer throughput
encountered by the 2010.
6.2.1 Pyrolysis Tube
After several runs, a yellowish, brittle deposit will be found in the pyrolysis tube. This deposit will be most
prevalent near the inlet port of the chamber base. Typically, this deposit will need to be removed after a dimer
throughput of 300 to 400 grams.
To remove deposit from the pyrolysis tube:
1. Place a tool under the deposit to separate it from the tube.
2. Peel or scrape out the deposit.
3. After removing the build-up, work a wire brush or equivalent through the inside diameter of the pyrolysis
tube to dislodge any remaining debris.
4. Use a vacuum cleaner to remove any material that may have fallen down the pyrolysis tube. (Access to
the bottom of the pyrolysis section is best achieved through the vaporizer load door.)
6.2.2 O-Rings, Vacuum System Seals
The O-rings at the vaporizer load door and the pyrolysis tube connection at the base of the chamber are
significantly susceptible to high temperature fatigue. The chamber gasket and cold trap O-ring are subject to
abuse from normal day-to-day cleaning and handling. These O-rings and gaskets should be inspected
frequently and replaced as necessary.
A new precision-made system will not ordinarily require grease on its O-rings. As a system ages however,
the accumulation of minute scratches and bits of material in the groove make it harder for the O-ring to
maintain an excellent seal. In such times, it may be helpful to apply
very small amounts of silicone grease
(pn 20117) to non-heated O-rings. An additional advantage of using the grease on the chamber rings is
that removing parylene deposits will be much easier.