SCS LABCOTER 2, Руководство оператора

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OM-610-1002-1 Operator’s Manual Rev 37
PDS-2010 SECTION 6 MAINTENANCE page
55
6.5 OPERATION AND MAINTENANCE LOGS
The 2010 is a robust piece of equipment, but the Parylene process requires periodic maintenance to be
performed. Cleaning of the Parylene from the chamber and cold trap probe is essential to avoid coating
build-up that otherwise would eventually destroy the performance of the system
Logs should be maintained on Daily Operation, Daily Maintenance, and Periodic Maintenance. Example
logs are shown below. Using and following the recommendations in these logs will maximize trouble free
operation of the PDS 2010 coating process.
DAILY OPERATION LOG
Date Film
Thick-
ness
Load
Size
Sq.
Inches
Dimer Usage Base
Pressure
Base
Pump
Down
Time
Run
Time
Vaporizer
Parameters
Chamber
Parameters
Run Total Cold Hot Set Point SP Lo
(Base)
DAILY MAINTENANCE LOG
(Inspect, Check Condition, Remove, Replace, Clean or Apply)
Date O-Rings and
Sealing Surfaces
Vaporizer and
Dimer Boat
Chamber, Baffle Turntable,
Sight Glass
Cold Trap and
Probe
Vacuum
Pump Oil
Load Door
Chamber Gasket
Cold Trap
Remove
Residuals
Remove Parylene Build-up
Apply Release Agent on
Bare Surfaces Only
Thoroughly Clean
After Every Run
Apply Release
Agent
Check
Replace