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OM-610-1002-1 Operator’s

Manual

Rev 37

PDS-2010

SECTION 7 COMPONENT LOCATION

page

FP-088-1081-1 REDUCED DOME CHAMBER

Содержание LABCOTER 2

Страница 1: ...__________ Make certain that everyone associated with this instrument becomes knowledgeable about the material contained in this manual before using the equipment 7645 Woodland Drive Indianapolis IN 4...

Страница 2: ...Rev 37 Operator s Manual OM 610 1002 1 7645 WOODLAND DRIVE INDIANAPOLIS IN 46278 2707 PH 800 356 8260 VOLTS AMPS PHASE HZ INT CAPACITY AMP MFG DATE SCHEMATICS MODEL NO SERIAL NO...

Страница 3: ...OM 610 1002 1 Operator s Manual Rev 37...

Страница 4: ...Rev 37 Operator s Manual OM 610 1002 1...

Страница 5: ...ERVICES PROVIDED BY THE CUSTOMER 9 4 3 SHIPPING DAMAGE 9 4 4 UNPACKING 9 4 5 EQUIPMENT PLACEMENT 10 4 6 INSPECTION 10 4 7 ELECTRICAL POWER INSTALLATION 10 4 8 CHILLER OPTION 11 4 9 LIQUID NITROGEN OPT...

Страница 6: ...End Of Run 31 5 12 SUCCESSIVE RUNS 32 5 13 SEMI AUTOMATIC OPERATION 32 5 14 OPERATING CONSIDERATIONS 33 5 14 1 Deposition Rate 33 5 14 2 Amount of Substrate 33 5 14 3 Type of Substrate 33 5 14 4 Orie...

Страница 7: ...1 FACILITIES DRAWING 61 AD 610 1010 1 120V ASSEMBLY 63 AD 610 1011 1 220V ASSEMBLY 65 AD 610 1065 1 200 VOLT ASSEMBLY 67 AD 286 1041 1 BASIC FRAME ASSEMBLY 1 OF 2 69 AD 286 1041 1 BASIC FRAME ASSEMBL...

Страница 8: ...01 2 CE ELECTRICAL SCHEMATIC 2 OF 2 125 ES 610 1068 1 DOMESTIC ELECTRICAL SCHEMATIC 1 OF 3 127 ES 610 1068 1 DOMESTIC ELECTRICAL SCHEMATIC 2 OF 3 129 ES 610 1068 1 DOMESTIC ELECTRICAL SCHEMATIC 3 OF 3...

Страница 9: ...fforts are also continuously made to include CE compliant components wherever possible 1 1 GENERAL INFORMATION The following warning symbols are used through out this manual HOT SURFACE ELECTRICAL SHO...

Страница 10: ...periods of unattended operation Follow normal industrial safety practices with respect to 100 220 volts AC and moving parts Use of this machine for anything but its intended purpose may create a safe...

Страница 11: ...ating element or the sensor itself when they are hot 1 5 INLET BAFFLE Wear protective gloves when removing the inlet baffle from the deposition chamber after a coating run This baffle may become heate...

Страница 12: ...er no circumstances should the water temperature be over 44 C 112 F nor should the frozen part be rubbed either before or after re warming The patient should not smoke or drink alcohol Keep warm and a...

Страница 13: ...automatic operation the system pumps down to a preset pressure while the furnace and chamber gauge cycle up to their operation temperature When all temperatures and pressures are within their set ope...

Страница 14: ...Rev 37 Operator s Manual OM 610 1002 1 page 6 SECTION 2 OVERVIEW PDS 2010...

Страница 15: ...10 220 VAC single phase 50 60 Hz 20 12 A Specified at time of purchase Dimer Capacity 125 grams Vacuum Pump 8 5 CFM two stage direct drive Exhaust Approx 8 5 CFM 0 1 Inch Water 14 5 M3 H Cold Trap Opt...

Страница 16: ...Rev 37 Operator s Manual OM 610 1002 1 page 8 SECTION 3 EQUIPMENT SPECIFICATION PDS 2010 Figure 2 Useable Chamber Size Figure 1 Facilities Drawing...

Страница 17: ...f an SCS Installation Start up service call is scheduled the customer s installation must be completed before the arrival of the SCS service technician The customer is requested to give a minimum one...

Страница 18: ...iation in a work area which is not provided with adequate ventilation The work area ventilation must provide for a normal atmosphere in the work area The PDS 2010 is not designed for use in a clean ro...

Страница 19: ...r uses a special chamber with a removable lid Reference drawing AD 285 1161 in Section 7 Remove the side panels from the PDS 2010 Remove the lid from the chamber and set it aside Remove the viewport f...

Страница 20: ...n and systematically verify proper operation of all functions Verify proper operation of Emergency Stop pushbutton After the system is fully functional perform the initial product processing assistanc...

Страница 21: ...ts one atmosphere equals 29 92 inches of mercury inch Hg 760 mm Hg 760 Torr and 1 013 bar The term vacuum units is used frequently in this manual to indicate a pressure reading on the equipment contro...

Страница 22: ...ice Medium Vacuum represents pressures between 1 and 1x10 3 Torr absolute This is a transition range between viscous and molecular flow Most pumps serving this range are also mechanical The 2010 perfo...

Страница 23: ...low is the flow of gas through an enclosure under conditions such that the mean free path is of the order as the dimensions of the enclosure In this flow regime the flow characteristics are determined...

Страница 24: ...l mean the chamber pressure Hot or Cold Base Pressure The chamber pressure sensor simply called gauge tube here is heated during processing so that Parylene does not deposit on it A thermocouple in it...

Страница 25: ...pes of Parylene The expected increase of pressure in the deposition chamber during a coating run is controlled at a higher pressure than the other Parylenes Parylene N deposits at a rate of approximat...

Страница 26: ...s is responsible for the truly conformal nature of the coating The deposition process consists of the following steps done in the presence of a medium vacuum 1 Vaporization Parylene is vaporized from...

Страница 27: ...on chamber past the probe cold trap and then through the vacuum pump which exhausts to the atmosphere 5 3 2 4 Typical Coating Cycle 1 The substrate to be coated is loaded in the deposition chamber and...

Страница 28: ...on takes place The monomer will deposit and polymerize on all the ambient temperature surfaces within the deposition chamber this includes the loaded substrate fixturing chamber walls baffles and any...

Страница 29: ...controller PhA2 It can also be accomplished by starting the vaporizer heater at a lower set point If initial overshoot is a problem start the lower set point or it can be done manually by starting th...

Страница 30: ...s operating range the fault alarm detection sequence will be initiated 5 5 2 Chamber Gauge Temperature Controller The chamber gauge controller displays and controls the temperature of the vacuum gauge...

Страница 31: ...ting at the end of a run The output 1 light is always on except when the vaporizer is above its set point value In some applications the initial rise or overshoot in chamber pressure may be unacceptab...

Страница 32: ...s Under normal operating conditions it is possible that contamination of the seat of the integral pump isolation valve that will allow air back through the pump into the system Consult the Edwards man...

Страница 33: ...t least 20 seconds after the PROCESS START STOP is depressed or after main power is turned on After the furnace monitor is enabled any deviation from the furnace set point as indicated by the furnace...

Страница 34: ...to the 2010 A LN2 supply regulated at 20 25 PSIG is recommended for auto control of the LN2 into the cold trap probe The Auto LN2 low level sensor opens the solenoid valve to allow LN2 to flow into t...

Страница 35: ...for KBWS Whisper Drive located in the Technical Literature section 2 Disconnect the main power from the PDS 2010 3 The tumbler drive assembly uses a 130VDC motor For the 130VDC motor set Jumper J1 to...

Страница 36: ...ting cycles during regular use as warranted by changes in coating quality Determining Base Pressure The following procedure should be used to check the base pressure of an unloaded 2010 system clean d...

Страница 37: ...y aluminum foil sheet By shaping the boat so it touches as much of the heater walls as possible the heat transfer is optimized To create a dimer boat 1 Cut a rectangular piece of aluminum foil to 11 i...

Страница 38: ...over the base The chamber base split line has some tolerance to allow for easy fit of the chamber onto the base For most coating applications it is desirable to place the chamber as far to the right...

Страница 39: ...he vacuum 5 11 5 End Of Run CAUTION The system will maintain vacuum until the PROCESS START STOP button is depressed or the VENT switch is moved to the VENT position 1 Disable chilling of the cold tra...

Страница 40: ...the Vaporizer has cooled below 40 C load a new charge of Parylene dimer If you load the vaporizer before it cools the Parylene dimer will begin to vaporize immediately this will lead to pump down prob...

Страница 41: ...e Consider the total amount of coating surface area when determining the amount of Parylene dimer needed to achieve a given coating thickness In addition to the substrate the chamber walls baffle and...

Страница 42: ...overall efficiency of the 2010 Relatively large leaks can affect the quality of the Parylene coating 5 14 7 Baffle The chamber inlet baffle is extremely important for the even distribution of monomer...

Страница 43: ...anate to the 100 ml beaker 3 Agitate the sample by gently swirling the beaker contents for 15 30 seconds DO NOT mix the sample in any other way 4 Observe the color of the sample A good solution will t...

Страница 44: ......

Страница 45: ...the Parylene film itself but only to the bare uncoated surfaces that will receive a coating during the first deposition cycle after cleaning 6 1 2 Parylene Coating Removal The following items should b...

Страница 46: ...ealing surfaces and O rings The contamination in most cases has been found to be small particles of trapped polymer It is good operating practice to check the sealing surfaces of the vaporizer access...

Страница 47: ...deposit will be found in the pyrolysis tube This deposit will be most prevalent near the inlet port of the chamber base Typically this deposit will need to be removed after a dimer throughput of 300...

Страница 48: ...acer with solvent 8 Liberally coat the shaft and housing bore in the marked A with APIEZON K vacuum oil 9 Coat the new O rings and spacer with APIEZON K vacuum oil and install in the housing 10 Press...

Страница 49: ...the feed thru and install a new O ring on the feed thru Reinstall in the chamber in the reverse order of removal 6 3 PROCESS TEMPERATURE CONTROLLERS The WEST process controllers used on the 2010 cont...

Страница 50: ...ont door Verification is complete 6 3 2 Vacuum Controller The 2010 chamber pressure is monitored and controlled by a combination of three 3 components Pirani type pressure transducer housed within the...

Страница 51: ...ng 1 Remove all power to the machine 2 Remove the cabinet side panels 3 Replace the lead wires at terminals 4 and 5 of the controller with leads from a qualified variable voltage source capable of 0 1...

Страница 52: ...isplay Turning the potentiometer clockwise will raise the displayed value and turning it counterclockwise will lower it 7 The zero adjust calibration is now complete Turn off the Main Power reconnect...

Страница 53: ...lower display will show Uloc 4 Use the Raise key to increment the PV value until the controller shows the proper Unlock code the default code is 20 and then depress the Function key The display will...

Страница 54: ...crement the PV value until the upper display shows the proper Unlock code the default code is 10 and then depress the Function key The MAN light will come on and display the first parameter in the Set...

Страница 55: ...C 0_10 ruL 761 761 761 1112 rLL 0 0 0 4 dPoS 0 CtyP SnGL SnGL SnGL SnGL CtrL rEv rEv rEv rEv ALA 1 bAnd bAnd P_Hi P_Lo bAL 1 PhA 1 PLA 1 AHY 1 1 1 1 1 ALA 2 nonE nonE P_Hi nonE PhA 2 AHY 2 1 LAEn diSA...

Страница 56: ...ad only read only read only read only Pb_P 1 0 1 0 5 0 0 5 ArST 2 37 0 41 2 00 3 00 rAtE 0 39 0 10 0 30 1 40 biAS 25 25 25 25 SPuL 720 140 180 100 SPLL 0 0 0 4 OPuL 100 100 100 100 Ct 1 32 32 32 32 bA...

Страница 57: ...Control Action REv reverse acting ALA 1 Alarm 1 Type P_Hi PhA 1 Process High Alarm 1 value Range Max PLA 1 Process Low Alarm 1 value Range Min bAL 1 Band Alarm 1 value 5 AHY 1 Alarm 1 Hysteresis 1 ALA...

Страница 58: ...r Limit 100 Ct 1 Output 1 Cycle Time 32 sec bAL 1 Band Alarm 1 value 5 PhA 1 High Alarm 1 value Max Range PLA 1 Low Alarm 1 value Min Range AHY 1 Alarm 1 Hysteresis 1 PhA 2 High Alarm 2 value Max Rang...

Страница 59: ...ay be adjusted to be within input span from set point biAS Bias Manual Reset This bias to the output power is expressed as a percentage of output power and is adjustable in the range 0 to 100 This par...

Страница 60: ...uration Mode LAEn Loop Alarm This is a controller parameter it is the means by which the user can enable or disable the loop alarm The loop alarm is a special alarm that detects faults in the control...

Страница 61: ...e in engineering units It defines the displayed value when the process variable input is at its minimum value It is adjustable between 1999 to 9999 and can be set to a value more than but not within 1...

Страница 62: ...alue that avoids causing damage to the process being controlled The Set Point Low Limit may be adjusted between the Input Range Minimum and the current set point value SPr Set Point Ramp This paramete...

Страница 63: ...Using and following the recommendations in these logs will maximize trouble free operation of the PDS 2010 coating process DAILY OPERATION LOG Date Film Thick ness Load Size Sq Inches Dimer Usage Base...

Страница 64: ...ter Solution Pliers Single Edge Razor Blades Hi Temperature O Ring Grease Tweezers Screwdrivers Non Flammable Solvent Flash Light SA 285 1119 1 2010 Rotary Feed Thru Rebuild Kit SA 285 1216 1 2010 Cle...

Страница 65: ...ple If temperature overshoots increase Vaporizer Pb1 by 10 Uneven coating distributions in the chamber Parts not uniformly loaded in the chamber Chamber baffle warped clogged or loose fitting Fixture...

Страница 66: ...Rev 37 Operator s Manual OM 610 1002 1 page 58 SECTION 6 MAINTENANCE PDS 2010...

Страница 67: ...number The following Assemblies are included ITEM ASSEMBLY FACILITIES DRAWING FD 610 1007 1 ASSEMBLY 120 Volt 60 Hz AD 610 1010 1 ASSEMBLY 220 Volt 50 Hz AD 610 1011 1 ASSEMBLY 200 Volt w o Pump AD 6...

Страница 68: ...Rev 37 Operator s Manual OM 610 1002 1 page 60 SECTION 7 COMPONENT LOCATION PDS 2010...

Страница 69: ...OM 610 1002 1 Operator s Manual Rev 37 PDS 2010 SECTION 7 COMPONENT LOCATION page 61 FD 610 1007 1 FACILITIES DRAWING...

Страница 70: ...Rev 37 Operator s Manual OM 610 1002 1 page 62 SECTION 7 COMPONENT LOCATION PDS 2010...

Страница 71: ...OM 610 1002 1 Operator s Manual Rev 37 PDS 2010 SECTION 7 COMPONENT LOCATION page 63 AD 610 1010 1 120V ASSEMBLY...

Страница 72: ...Rev 37 Operator s Manual OM 610 1002 1 page 64 SECTION 7 COMPONENT LOCATION PDS 2010...

Страница 73: ...OM 610 1002 1 Operator s Manual Rev 37 PDS 2010 SECTION 7 COMPONENT LOCATION page 65 AD 610 1011 1 220V ASSEMBLY...

Страница 74: ...Rev 37 Operator s Manual OM 610 1002 1 page 66 SECTION 7 COMPONENT LOCATION PDS 2010...

Страница 75: ...OM 610 1002 1 Operator s Manual Rev 37 PDS 2010 SECTION 7 COMPONENT LOCATION page 67 AD 610 1065 1 200 VOLT ASSEMBLY...

Страница 76: ...Rev 37 Operator s Manual OM 610 1002 1 page 68 SECTION 7 COMPONENT LOCATION PDS 2010...

Страница 77: ...OM 610 1002 1 Operator s Manual Rev 37 PDS 2010 SECTION 7 COMPONENT LOCATION page 69 AD 286 1041 1 BASIC FRAME ASSEMBLY 1 OF 2...

Страница 78: ...Rev 37 Operator s Manual OM 610 1002 1 page 70 SECTION 7 COMPONENT LOCATION PDS 2010...

Страница 79: ...OM 610 1002 1 Operator s Manual Rev 37 PDS 2010 SECTION 7 COMPONENT LOCATION page 71 AD 286 1041 1 BASIC FRAME ASSEMBLY 2 OF 2...

Страница 80: ...Rev 37 Operator s Manual OM 610 1002 1 page 72 SECTION 7 COMPONENT LOCATION PDS 2010...

Страница 81: ...OM 610 1002 1 Operator s Manual Rev 37 PDS 2010 SECTION 7 COMPONENT LOCATION page 73 AD 610 1001 4 ELECTRICAL PANEL ASSEMBLY...

Страница 82: ...Rev 37 Operator s Manual OM 610 1002 1 page 74 SECTION 7 COMPONENT LOCATION PDS 2010...

Страница 83: ...OM 610 1002 1 Operator s Manual Rev 37 PDS 2010 SECTION 7 COMPONENT LOCATION page 75 AD 215 1007 1 LOAD DOOR ASSEMBLY...

Страница 84: ...Rev 37 Operator s Manual OM 610 1002 1 page 76 SECTION 7 COMPONENT LOCATION PDS 2010...

Страница 85: ...OM 610 1002 1 Operator s Manual Rev 37 PDS 2010 SECTION 7 COMPONENT LOCATION page 77 AD 374 1029 2 HEATER ASSEMBLY...

Страница 86: ...Rev 37 Operator s Manual OM 610 1002 1 page 78 SECTION 7 COMPONENT LOCATION PDS 2010...

Страница 87: ...OM 610 1002 1 Operator s Manual Rev 37 PDS 2010 SECTION 7 COMPONENT LOCATION page 79 AD 241 1007 1 FIXTURE ROTATION ASSEMBLY...

Страница 88: ...Rev 37 Operator s Manual OM 610 1002 1 page 80 SECTION 7 COMPONENT LOCATION PDS 2010...

Страница 89: ...OM 610 1002 1 Operator s Manual Rev 37 PDS 2010 SECTION 7 COMPONENT LOCATION page 81 AD 157 1019 1 LN2 CHILLER ASSEMBLY 1 OF 2...

Страница 90: ...Rev 37 Operator s Manual OM 610 1002 1 page 82 SECTION 7 COMPONENT LOCATION PDS 2010...

Страница 91: ...OM 610 1002 1 Operator s Manual Rev 37 PDS 2010 SECTION 7 COMPONENT LOCATION page 83 AD 157 1019 1 LN2 CHILLER ASSEMBLY 2 OF 2...

Страница 92: ...Rev 37 Operator s Manual OM 610 1002 1 page 84 SECTION 7 COMPONENT LOCATION PDS 2010...

Страница 93: ...OM 610 1002 1 Operator s Manual Rev 37 PDS 2010 SECTION 7 COMPONENT LOCATION page 85 AD 724 1097 1 LN2 LEVEL CONTROLLER ASSEMBLY...

Страница 94: ...Rev 37 Operator s Manual OM 610 1002 1 page 86 SECTION 7 COMPONENT LOCATION PDS 2010...

Страница 95: ...OM 610 1002 1 Operator s Manual Rev 37 PDS 2010 SECTION 7 COMPONENT LOCATION page 87 AD 241 1008 1 STANDARD FIXTURE...

Страница 96: ...Rev 37 Operator s Manual OM 610 1002 1 page 88 SECTION 7 COMPONENT LOCATION PDS 2010...

Страница 97: ...OM 610 1002 1 Operator s Manual Rev 37 PDS 2010 SECTION 7 COMPONENT LOCATION page 89 D50016 VACUUM CHAMBER...

Страница 98: ...Rev 37 Operator s Manual OM 610 1002 1 page 90 SECTION 7 COMPONENT LOCATION PDS 2010...

Страница 99: ...OM 610 1002 1 Operator s Manual Rev 37 PDS 2010 SECTION 7 COMPONENT LOCATION page 91 AD 088 1031 1 CHAMBER WITH VIEWPORT LID...

Страница 100: ...Rev 37 Operator s Manual OM 610 1002 1 page 92 SECTION 7 COMPONENT LOCATION PDS 2010...

Страница 101: ...OM 610 1002 1 Operator s Manual Rev 37 PDS 2010 SECTION 7 COMPONENT LOCATION page 93 FP 088 1081 1 REDUCED DOME CHAMBER...

Страница 102: ...Rev 37 Operator s Manual OM 610 1002 1 page 94 SECTION 7 COMPONENT LOCATION PDS 2010...

Страница 103: ...OM 610 1002 1 Operator s Manual Rev 37 PDS 2010 SECTION 7 COMPONENT LOCATION page 95 AD 285 1161 1 TUMBLE KIT 1 OF 3...

Страница 104: ...Rev 37 Operator s Manual OM 610 1002 1 page 96 SECTION 7 COMPONENT LOCATION PDS 2010...

Страница 105: ...OM 610 1002 1 Operator s Manual Rev 37 PDS 2010 SECTION 7 COMPONENT LOCATION page 97 AD 285 1161 1 TUMBLE KIT 2 OF 3...

Страница 106: ...Rev 37 Operator s Manual OM 610 1002 1 page 98 SECTION 7 COMPONENT LOCATION PDS 2010...

Страница 107: ...OM 610 1002 1 Operator s Manual Rev 37 PDS 2010 SECTION 7 COMPONENT LOCATION page 99 AD 285 1161 1 TUMBLE KIT 3 OF 3...

Страница 108: ...Rev 37 Operator s Manual OM 610 1002 1 page 100 SECTION 7 COMPONENT LOCATION PDS 2010...

Страница 109: ...OM 610 1002 1 Operator s Manual Rev 37 PDS 2010 SECTION 7 COMPONENT LOCATION page 101 AD 285 1055 1 TUMBLE ADAPTOR 1 OF 2...

Страница 110: ...Rev 37 Operator s Manual OM 610 1002 1 page 102 SECTION 7 COMPONENT LOCATION PDS 2010...

Страница 111: ...OM 610 1002 1 Operator s Manual Rev 37 PDS 2010 SECTION 7 COMPONENT LOCATION page 103 AD 285 1055 1 TUMBLE ADAPTOR 2 OF 2...

Страница 112: ...Rev 37 Operator s Manual OM 610 1002 1 page 104 SECTION 7 COMPONENT LOCATION PDS 2010...

Страница 113: ...OM 610 1002 1 Operator s Manual Rev 37 PDS 2010 SECTION 7 COMPONENT LOCATION page 105 AD 241 1185 1 FIXTURE 3...

Страница 114: ...Rev 37 Operator s Manual OM 610 1002 1 page 106 SECTION 7 COMPONENT LOCATION PDS 2010...

Страница 115: ...OM 610 1002 1 Operator s Manual Rev 37 PDS 2010 SECTION 7 COMPONENT LOCATION page 107 AD 684 1005 1 TUMBLER BASKET OPTION...

Страница 116: ...Rev 37 Operator s Manual OM 610 1002 1 page 108 SECTION 7 COMPONENT LOCATION PDS 2010...

Страница 117: ...12 BUNA N LG12B LESKER 20079 1 EA CENTERING RING W SCRN QF25 SRV SM LESKER 20080 2 EA O RING VITON SZ 231 2 231 V884 75 PARKER 20081 1 EA O RING SILICONE 2 234 S604 70 20084 2 EA O RING SZ 240 NITRILE...

Страница 118: ...EA RELAY SSR 25A 3 32VDC C G RM1A23D25 20195 1 EA BRIDGE AMP W CABLE 275239 G P 20052 1 EA HEATER BAND 240V 500W STB1J3A2 A12 WAT 20056 1 EA HEATER 150W RING A 00 135247 CHROMOLOX 20058 1 EA FAN AXIA...

Страница 119: ...need venting cooling etc skip the unneeded step STEP OPERATOR ACTION PDS 2010 ACTIONS 1 Power on the PDS 2010 with the MAIN POWER ON button The process controllers will be on when main power is on Th...

Страница 120: ...CHAMBER With a spray bottle and a lint free cloth apply a 2 solution of Micro Soap and water release agent to all the bare stainless steel surfaces from where the Parylene coating must later be strip...

Страница 121: ...es not drip or fall into the Cold Trap and eventually cause damage Allow 10 minutes for the flex line and its junction to the probe to warm before moving do not wait so long that the frozen material o...

Страница 122: ...efore pumping down 3b LN2 OPTION Ref Section 5 8 2 NOTE Do not enable the LN2 at this time See step 8 4 Depress PROCESS START STOP After depressing this pushbutton the button will be illuminated green...

Страница 123: ...ad Door and Dimer Boat to cool before handling them and wear protective gloves when removing the Dimer Boat Load the measured amount of Dimer in a Dimer Boat Close the LOAD DOOR 8 Switch the VACUUM se...

Страница 124: ...ization of the dimer before proceeding to step 12 12 After base pressure has been achieved again a 5 minute Bake Out timer is enabled This ensures all parylene dimer gets vaporized 13 Press the PROCES...

Страница 125: ...cifically limited to protective coatings thermocouples heaters seals o rings drive belts relays lamps and bearings but not including filters to a period of ninety 90 days from the date of shipment Tes...

Страница 126: ...plying of this equipment or its use whether based on warranty contract or negligence shall not in any case exceed the cost of correcting defects in the equipment as herein provided and upon expiration...

Страница 127: ...er to open the files It is free and is provided with most pieces of software to read their manuals The disk should start automatically if it does not start begin by opening the file AccessPage PDF Fro...

Страница 128: ...Rev 37 Operator s Manual OM 610 1002 1 page 120 SECTION 10 WARRANTY PDS 2010...

Страница 129: ...TURE page 121 SECTION 12 ELECTRICAL SCHEMATICS The following Electrical Schematics are included in this manual CE Electrical Schematic ES 610 1001 2 Domestic Electrical Schematic ES 610 1001 3 220V El...

Страница 130: ...Rev 37 Operator s Manual OM 610 1002 1 page 122 SECTION 10 WARRANTY PDS 2010...

Страница 131: ...PDS 2010 SCHEMATICS page 123 ES 610 1001 2 CE ELECTRICAL SCHEMATIC 1 OF 2...

Страница 132: ...page 124 SCHEMATICS PDS 2010...

Страница 133: ...PDS 2010 SCHEMATICS page 125 ES 610 1001 2 CE ELECTRICAL SCHEMATIC 2 OF 2...

Страница 134: ...page 126 SCHEMATICS PDS 2010...

Страница 135: ...PDS 2010 SCHEMATICS page 127 ES 610 1068 1 DOMESTIC ELECTRICAL SCHEMATIC 1 OF 3...

Страница 136: ...page 128 SCHEMATICS PDS 2010...

Страница 137: ...PDS 2010 SCHEMATICS page 129 ES 610 1068 1 DOMESTIC ELECTRICAL SCHEMATIC 2 OF 3...

Страница 138: ...page 130 SCHEMATICS PDS 2010...

Страница 139: ...PDS 2010 SCHEMATICS page 131 ES 610 1068 1 DOMESTIC ELECTRICAL SCHEMATIC 3 OF 3...

Страница 140: ...page 132 SCHEMATICS PDS 2010...

Страница 141: ...PDS 2010 SCHEMATICS page 133 ES 610 1001 5 220V ELECTRICAL SCHEMATIC 1 OF 3...

Страница 142: ...page 134 SCHEMATICS PDS 2010...

Страница 143: ...PDS 2010 SCHEMATICS page 135 ES 610 1001 5 220V ELECTRICAL SCHEMATIC 2 OF 3...

Страница 144: ...page 136 SCHEMATICS PDS 2010...

Страница 145: ...PDS 2010 SCHEMATICS page 137 ES 610 1001 5 220V ELECTRICAL SCHEMATIC 3 OF 3...

Страница 146: ...page 138 SCHEMATICS PDS 2010...

Страница 147: ...PDS 2010 SCHEMATICS page 139 ES 610 1065 1 200V ELECTRICAL SCHEMATIC 1 OF 3...

Страница 148: ...page 140 SCHEMATICS PDS 2010...

Страница 149: ...PDS 2010 SCHEMATICS page 141 ES 610 1065 1 200V ELECTRICAL SCHEMATIC 2 OF 3...

Страница 150: ...page 142 SCHEMATICS PDS 2010...

Страница 151: ...PDS 2010 SCHEMATICS page 143 ES 610 1065 1 200V ELECTRICAL SCHEMATIC 3 OF 3...

Страница 152: ...page 144 SCHEMATICS PDS 2010...

Страница 153: ...items Alarm Codes 23 AP Wet Promotion 35 Base Pressure 16 28 Cold Trap Probe 31 38 Deposition Rate 33 Environment 7 Icon Warning 1 Micro Soap 37 milliTorr 13 MSDS 2 Nitrogen 4 11 26 Operating Environm...

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