SCS LABCOTER 2, Руководство оператора

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Rev 37 Operator’s Manual OM-610-1002-1
page 30 SECTION 5 OPERATION PDS-2010
5.11.2 System Preparation
1. Load the dimer boat, containing a pre-measured amount Parylene dimer, into the vaporizer by opening the
load door located in the lower front compartment. The maximum amount of dimer is 125g; typical
amounts may be much less.
2. Treat all surfaces of the baffle, chamber interior, cold trap probe, and cold trap housing with a release
agent (2% Micro® soap solution). See Section 6.1, Parylene Deposit Removal.
3. Insert the inlet baffle over the chamber inlet port. The baffle installs with the holes pointing toward the
chamber wall. Use high-temperature tape at the base to retain the baffle straight upright, and to seal the
other (top) end of the baffle. Refer to Section 5.13.7.
Make sure the baffle clears the fixture if the
rotation option is installed.
NOTICE: Be sure to tape any gaps that may exist at the baffle/inlet port interface. Failure to do so results
in a monomer gas leak that bypasses the baffle. This could be detrimental to coating quality.
4. Fixture the parts on the chamber base within the confines of the chamber; avoid direct contact between the
baffle and the fixture/parts.
5. Make sure O-rings and gaskets and their matching surfaces are very clean. Insert the cold trap probe into
the cold trap housing, close the vaporizer load door, and lower the chamber over the base.
The chamber/base split line has some tolerance to allow for easy fit of the chamber onto the base. For
most coating applications, it is desirable to place the chamber as far to the right of the base as possible in
order to minimize the gap between the chamber wall and the lower portion of the inlet baffle. This will
provide for the best Parylene distribution during deposition.
6. Provide/maintain liquid nitrogen for the cold trap probe, or start the mechanical chiller.
5.11.3 Start-Up
1. Release the Emergency Stop by turning it clockwise, or pulling it out.
2. Depress the MAIN POWER pushbutton. The computer will initialize and the vacuum and temperature
controllers will illuminate.
3. Check all the controller set point values. If a protracted pump down is desired to eliminate anticipated
outgassing, set it at this time (refer to Section 5.7). If a lower initial vaporizer set point is desired, it should
also be set at this time (see Section 5.5).
4. ENABLE the Furnace/Chamber Gauge and Vaporizer switches. Enable the mechanical chiller.
5. After the chiller has been on 45 minutes for the mechanical chiller or 5 minutes for the LN
2
chiller, turn
the Vacuum Pump switch to the VACUUM position.
5.11.4 Computer Control Sequence
After completing the above, depress the PROCESS START/STOP button. The computer will automatically
control the deposition process in the following sequence:
1. Chamber gauge and furnace heaters come on and heat up to set point value.
•
Vaporizer is disabled.
•
Vaporizer temperature fault monitor is enabled.
•
Rotation (if installed) comes on.