SCS LABCOTER 2, Руководство оператора

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Rev 37 Operator’s Manual OM-610-1002-1
page 32 SECTION 5 OPERATION PDS-2010
•
Minimize handling of the probe while it is chilled and handle the probe carefully at all times
to avoid mechanical damage to the probe. Do not allow the probe to warm to room
temperature while under vacuum—trapped material may separate from the probe surface
and scatter through the vacuum system when venting. Note that corrosive compounds are
produced (in small amounts) as a byproduct of the Parylene deposition and are condensed
on the probe surface.
• Regular cleaning is imperative to prevent corrosion and pitting of the probe. See Section 6.
3. The chamber is now ready to be unloaded.
If the 2010 is to be powered down, first pump it down to keep the interior clean. If another coating cycle is to
be performed, continue with the next section.
5.12 SUCCESSIVE RUNS
If another run is desired, take the following preparations:
1. After the cold trap probe has been cleaned, re-apply the release agent.
2. Place the fixture on the chamber base.
WARNING: The chamber base inlet and baffle may be hot .
3. After the Vaporizer has cooled below 40°C, load a new charge of Parylene dimer. If you load the
vaporizer before it cools, the Parylene dimer will begin to vaporize immediately; this will lead to pump
down problems and likely degradation of the subsequent coating run. Wear protective gloves if the
vaporizer is hot.
4. Reseal chamber, cold trap probe, and vaporizer door.
5. Re-start chilling the cold trap (for 45 minutes or to a temperature of -75°C or below).
6. Press the PROCESS START/STOP button to start the process.
5.13 SEMI-AUTOMATIC OPERATION
Semi-automatic operation may be utilized for operator-controlled sequences and paced start-ups. All system
components except for the vaporizer may be controlled independently. The vaporizer will illuminate when
enabled but will not begin heating until:
•
the furnace/gauge tube heaters are within the allowable deviation of their set points
•
the pump output “1” light is on (indicating base pressure has been achieved)
•
the optional protracted pump down time (if used) has elapsed.
As during automatic operation, the ALARM pushbutton can be used to silence the audio alarm after an alarm
has been acknowledged. The operator has 5 minutes to resolve an alarm situation before the system will
automatically secure itself by shutting off all the heaters.