SCS LABCOTER 2, Руководство оператора

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Rev 37 Operator’s Manual OM-610-1002-1
page 42 SECTION 6 MAINTENANCE PDS-2010
6.3.1 Verifying the WEST Model 6100+ Temperature Controller
1. Remove all power to the machine. Open the front door of the 2010.
2. Disconnect the J-type thermocouple connector above the load door. Connect a male connector to a
qualified thermocouple simulator. Plug the male connector into the female connector of interest.
3. Re-install the panel and turn on the Main Power.
4. Simulate the input to the subject controller per the following chart:
TEMPERATURE
CONTROLLER
REFERENCE
TEMPERATURE
REQUIRED
ACCURACY
Furnace 690°C ± 3°C
Gauge Tube 140°C ± 3°C
Vaporizer 140°C ± 5°C
5.
If the process value set point reading of the subject controller is out of the specified accuracy range,
replace the controller. (This should be a very rare occurrence.)
6. If the controller reading is within specification, remove machine power, remove the panel, disconnect
the thermocouple simulator, re-install the subject thermocouple connector, and close the front door.
Verification is complete.
6.3.2 Vacuum Controller
The 2010 chamber pressure is monitored and controlled by a combination of three (3) components:
• Pirani-type pressure transducer housed within the gauge tube
• Amplifier circuit board which amplifies the gauge tube signal
• WEST Model 6100+ process controller which accepts the amplified (0-10VDC) signal, calculates the
chamber pressure reading, and then uses this information to control the vaporizer heaters.
As with the WEST temperature controllers, the 0-10VDC input process controller continually recalibrates
itself throughout operation and is not subject to drift caused by ambient temperature variations. The gauge
tube does not require nor provide the ability for field calibration. Therefore, the only component which will
normally require calibration will be the amplifier circuit board.
In order to provide the ability to fully calibrate the vacuum monitoring circuit, the procedures will be included
to verify all pressure monitoring components. For a comprehensive calibration, perform each of the following
procedures in sequence. However, in most cases, performing the Amplifier Circuit Board Calibration
procedure exclusively will be sufficient.