PRECITEC CHRocodile CLS0.2, Руководство по эксплуатации

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2.9 CHRocodile CLS performance specifications:
Axial Resolution:
Axial resolution corresponds to the static noise (standard deviation 1

) on altitude or thickness
measurements. It is an experimental specification. It is measured on 1000 continuous points along the
measuring range for each channel along the line. Axial resolution as a function of object position inside
measuring range is calculated for each channel along the line. By default axial resolution specification
corresponds to the minimum value (R
min
). ( See Fig. 2-11 ),
Fig 2-11: Axial Resolution as function of object position in Measuring Range for one channel
Accuracy:
Accuracy corresponds to the altitude deviation for each channel along the measuring range between
the CHRocodile CLS and a calibrated interferometric reference sensor. Consequently, accuracy is an
experimental specification. Accuracy as a function of object position inside measuring range is
calculated for each channel along the line. By default accuracy specification corresponds to the
maximum of absolute value (A
max
). ( See Fig. 2-12 ),
Fig 2-12: Accuracy as function of object position in Measuring Range for one channel
Position in the
Measuring Range
Channel p
Axial Resolution (nm)
R
min
0
0
Position in the
Measuring Range
Channel p
Accuracy (nm)
A
max
0