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Polytec TMS-500 TopMap Pro.Surf, Руководство по эксплуатации

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Contents

3.4 Cabling .............................................................................................................................3-16

3.4.1 Connecting the Hardware  .......................................................................................3-16
3.4.2 Connecting the Mains Cables  .................................................................................3-17

3.5 Functional Test  .................................................................................................................3-19

4 Measuring 4-1

4.1 Measuring with the Instrument  ............................................................................................4-1
4.2 High-Precision Measurements  ............................................................................................4-2
4.3 Setting up the Object Filter  .................................................................................................4-3
4.4 Maximum Load Capacity of Tip-Tilt Unit ...............................................................................4-4

5 Technical Specifications 

5-1

5.1 Harmonized Standards Applied ...........................................................................................5-1
5.2 Complete System  ...............................................................................................................5-1
5.3 TMS-I-500 Sensor Head  .....................................................................................................5-3

5.3.1 General Data  ............................................................................................................5-3
5.3.2 Optics .......................................................................................................................5-5

5.4 TMS-E-500 Controller  .........................................................................................................5-7
5.5 TMS-W-500 Data Management System  ..............................................................................5-8

5.5.1 General Data  ............................................................................................................5-8
5.5.2 Industrial PC Configuration  .......................................................................................5-8

5.6 A-SPK-0003 Tip-Tilt Unit .....................................................................................................5-9

Appendix A: TMS-A-305 Calibration Set 

Appendix B: EU Declaration of Conformity 

Index

Содержание TMS-500 TopMap Pro.Surf

Страница 1: ...Title Operating Instructions 3D Topography Measurement System TMS 500 TopMap Pro Surf Sensor Head TMS I 500 Controller TMS E 500 Data Management System TMS W 500...

Страница 2: ...e warranty also is invalidated in the case of the equipment being tampered with or modified without authorization To return the equipment always use the original packaging Otherwise we reserve the rig...

Страница 3: ...ng Notices 1 6 1 4 2 Applicable Standards and Directives 1 6 1 4 3 Equipment 1 6 1 4 4 Information on Risk Category 0 1 6 1 5 Electrical Safety 1 7 1 5 1 Important Warning Notices 1 7 1 5 2 Important...

Страница 4: ...4 4 Maximum Load Capacity of Tip Tilt Unit 4 4 5 Technical Specifications 5 1 5 1 Harmonized Standards Applied 5 1 5 2 Complete System 5 1 5 3 TMS I 500 Sensor Head 5 3 5 3 1 General Data 5 3 5 3 2 Op...

Страница 5: ...e ask us for a replacement 1 1 1 Warning Notices Used The following warning notices are used in these operating instructions and will give you important advice on how to use the instrument safely WARN...

Страница 6: ...es and information to simplify the operation of the device 1 2 Warning Labels and Mandatory Signs Used on the Equipment There are several warning labels and mandatory signs affixed to the instruments...

Страница 7: ...pecifications It is not necessary to tamper with the instrument to use it as intended as this will invalidate the warranty Any use other than the one described in these operating instructions is not p...

Страница 8: ...unsuitable transport The linear stage in the sensor head is mobile and can be damaged by jolting movements Only lift system components in pairs or using a suitable lifting device Protect the linear s...

Страница 9: ...are or software components Third party hardware or software components could damage the system or impair the function of the software To install components which have not been distributed by Polytec c...

Страница 10: ...Equipment Illumination module The instrument is equipped with an LED based illumination module Safety equipment The LED is switched on or off together with the controller Beam exit aperture The positi...

Страница 11: ...ed voltage Always disconnect the instrument from the mains before maintaining or cleaning it ATTENTION Damage to the device caused by insufficient opportunity for air circulation Heat is created insid...

Страница 12: ...e instrument is used as intended and connected to the power supply correctly exposure to electric current is prevented by the closed grounded metal housing The instrument is subjected to EU directive...

Страница 13: ...n and System Summary The TMS 500 is a 3D topography measurement system for optical non contact acquisition of the structure of rough and reflective surfaces The system components are shown in the foll...

Страница 14: ...lengths between the reference mirror and the corresponding points on the object are identical you receive an interference on the camera chip Depending on the topography of the object interferences are...

Страница 15: ...monitor with monitor cable and mains cable 3 Mains cables 1 Hardlock dongle 1 Network cable 1 USB 3 0 cable approved by Polytec 1 Polytec test object 1 Motor cable 1 Control cable 1 A STD P550 Stand i...

Страница 16: ...ction Pay attention to the following steps when unpacking 1 Check the packaging for signs of unsuitable handling during transport 2 After unpacking check all components for external damage scratches l...

Страница 17: ...it is shown in the following figure Figure 3 1 Front view of the sensor head with stand and tip tilt unit 1 Beam exit window with filter wheel To adjust various object filters 2 Spacer ring To raise t...

Страница 18: ...is shown in the following figure Figure 3 2 Back view of the sensor head 1 TRANSPORT LOCK transport lock To secure the linear stage to protect the sensor head during transport 2 Name plate Plate with...

Страница 19: ...camera and transmit the video signals 2 Transport lock To secure the linear stage to protect the sensor head during transport 3 MOTOR connection 17 pin circular connection Connection for the motor cab...

Страница 20: ...ntroller Front view The front view of the controller is shown in the following figure Figure 3 4 Front view of the controller 1 POWER status display Status display is lit The controller is ready for o...

Страница 21: ...ction for the motor cable to the sensor head for the power supply and the signal transmission of the linear stage motor 3 CONTROL connection 25 pin Sub D jack Connection for the control cable to the s...

Страница 22: ...tus display of the industrial PC Status display is lit The industrial PC is ready for operation 3 Status display of the hard disk drive Status display is lit The hard disk drive is active 4 RESET key...

Страница 23: ...box with recovery USB stick and instructions for Polytec Update Use the recovery USB stick to restore the delivery status of the hard disk drive of your Polytec Data Management System 2 Holder for Po...

Страница 24: ...o control the video camera and transmit the video signals 6 MONITOR connection Mini DisplayPort Connections for the TFT monitor 7 USB interfaces Universal Serial Bus type A Alternative connections for...

Страница 25: ...ATTENTION Damage to the device caused by insufficient opportunity for air circulation Heat is created inside the device during operation If the heat cannot escape from the housing a heat accumulation...

Страница 26: ...nts INFORMATION Keep the assembly instructions for all components in a safe place 3 3 1 Mounting the Sensor Head onto the Stand ATTENTION Misalignment of the optics caused by shock The optics of the s...

Страница 27: ...9 Assembling the sensor head on the stand 4 Screw the sensor head onto the stand using the two screws A and the screw B Tighten the screws using a maximum torque of 10 Nm If you do not have a torque w...

Страница 28: ...ly and flat on the supporting surface Use a supporting surface which is as flat as possible Place the sensor head only on the three supports near the attachment points marked red refer to FIGURE 5 4 S...

Страница 29: ...cer ring and tip tilt unit INFORMATION You will find further information on assembling the XY positioning stage in the operating instructions for accessories 3 3 4 Mounting the Test Sample onto the Ti...

Страница 30: ...up the instrument All the cabling is also shown in FIGURE 3 12 Secure the connections accordingly If you have any problems connecting up the cables contact your local Polytec representative 3 4 1 Conn...

Страница 31: ...e circular connections of the motor cable and on the devices are each marked with arrows During assembly the arrows must point directly at each other Figure 3 11 Circular connections with arrows 6 Clo...

Страница 32: ...3 18 3 First Steps Figure 3 12 Cabling of the system components...

Страница 33: ...arm up period of approx 180 minutes 4 Press the mains switch on the back of the industrial PC to position I 5 Press the POWER key on the front of the industrial PC 6 Start the TMS software 7 Open a me...

Страница 34: ...yed Figure 3 13 Measurement range A under the beam exit window 9 If the image is too dark or too bright adjust the exposure time as described in your TMS software manual 10 Make a measurement as descr...

Страница 35: ...o FIGURE 3 13 7 You can fix the object within the measurement range on the tip tilt unit using the threaded holes and the dowel pin holes In the TMS software the live video image of the object is disp...

Страница 36: ...any external distortions during the measurement set up the sensor head and the object on a vibration damped table INFORMATION Do not place moving parts on the vibration damped table as the measuremen...

Страница 37: ...object path The 0 Transmission setting can be used to help you decide which filter is suitable for the measurement The intensity ratio between the reference and the object beam should ideally not be...

Страница 38: ...its when positioning the object on the tip tilt unit Max load capacity in x direction The load capacity of the tip tilt unit in x direction is calculated as follows Equation 4 1 Example For an object...

Страница 39: ...ts for electrical equipment for measurement control and laboratory use EMC IEC EN 61326 1 EMC requirements on Emission and Immunity Electrical equipment for measurement control and laboratory use Emis...

Страница 40: ...5 2 5 Technical Specifications Figure 5 1 Views of the sensor head with stand spacer ring and tip tilt unit Unless otherwise specified all dimensions are in mm...

Страница 41: ...temperature range However the specifications with regards to the measurement uncertainty can only be warranted in a temperature range of 20 3 C Housing Calibration Noise emission Illumination Module...

Страница 42: ...igure 5 3 Dimensions of the sensor head from the side with the measurement range A Unless otherwise specified all dimensions are in mm Figure 5 4 Dimensions of the sensor head from the bottom Unless o...

Страница 43: ...Head Vertical measurement range 70 mm Version Max size of area of interest AOI Pixel resolution mm x mm m x m Large field of view 44 9 x 33 8 corners clipped Lateral 28 2 x 28 2 Small field of view 2...

Страница 44: ...ies the phase value of each measurement point is determined from which the height value is calculated 4 Empirically determined typical specification parameters for z performance of the sensor head whe...

Страница 45: ...urement time nm s 87 nominal 1 8 without averaging 196 0 8 without averaging Mains voltage 100 240 VAC 10 50 60 Hz Power consumption max 120 VA Fuses 3 15 A slow blow Protection class 1 protective gro...

Страница 46: ...40 C 41 104 F Storage temperature 10 65 C 14 149 F Air humidity max 80 non condensing Dimensions w x h x d 210 mm x 470 mm x 540 mm Weight 14 kg Protection rating IP20 according to EN 60529 Dimension...

Страница 47: ...5 5 Dimensions of the object support on the tip tilt unit metric design Dimensions not specified are given in mm dimensions in brackets in inch Weight tip tilt unit and spacer ring 8 5 kg Dimensions...

Страница 48: ...5 10 5 Technical Specifications Figure 5 6 Dimensions of the object support on the tip tilt unit imperial design Unless otherwise specified all dimensions are in mm dimensions in brackets in inch...

Страница 49: ...n set consists of Depth setting standard calibration standard Calibration certificate The depth setting standard is shown in following figure Figure A 1 View of the depth setting standard The depth se...

Страница 50: ...u also have to define them first INFORMATION If you define just one standard you will not have to select a standard later during calibration INFORMATION To define depth setting standards you require w...

Страница 51: ...ration certificate enter the depth uncertainty and width for every groove and if applicable delete any values which are not relevant refer to the following figure Figure A 2 Excerpt of the XML file to...

Страница 52: ...e following figure 3 Start the TMS software and open the measurement window Refer to your TMS software manual The live video image is displayed in the measurement window Figure A 3 Video image with de...

Страница 53: ...the measurement sequence table and the calibration depths from the calibration certificate for the depth setting standard refer to TMS software manual INFORMATION Measure the reference plane and the g...

Страница 54: ...mation in the file name is arbitrary The names of the device and the standard have to be given in the same way they have been entered in the dialog When entering the temperature make sure that the cha...

Страница 55: ...acro are displayed in the line view legend The following values are shown for each of the grooves evaluated Groove 1 groove 2 For every groove measured groove depth reduced to 20 C average of 6 profil...

Страница 56: ...influence of the uncertainty of the markers determined 1 6 see calibration certificate on the measurement result All calculation parameters for the expanded measurement uncertainty are regarded as bei...

Страница 57: ...B 1 B EU Declaration of Conformity Appendix B EU Declaration of Conformity Figure B 1 EU declaration of conformity...

Страница 58: ...B 2 B EU Declaration of Conformity...

Страница 59: ...3 7 controller front view 3 6 industrial PC back view 3 10 industrial PC front view 3 8 sensor head back view 3 4 sensor head bottom view 3 5 sensor head front view 3 3 G guarantee 1 3 H housing speci...

Страница 60: ...RESET figure industrial PC 3 8 return 3 2 S scope of supply 3 1 sensor head measurement range 5 5 noise emission 5 3 resolution 5 6 spacer ring figure sensor head 3 3 stand figure sensor head 3 3 sto...

Страница 61: ...9 Rue Pierre Semard 92320 Ch tillon Tel 33 1 49 65 69 00 Fax 33 1 57 19 59 60 E mail info polytec fr Internet http www polytec com fr Japan JP Polytec Japan 13th floor Arena Tower 3 1 9 Shinyokohama K...

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