5-5
5 Technical Specifications
5.3.2
Optics
Characteristics
Long-term Drift caused by Warming-up of the Sensor Head
Vertical measurement range:
70 mm
Version
Max. size of area of
interest (AOI)
Pixel resolution
[mm x mm]
[µm x µm]
Large field of
view
44.9 x 33.8
(corners clipped)
Lateral 28.2 x 28.2
Small field of view
22.8 x 17.2
Lateral 14.3 x 14.3
After switching on
Long-term drift
[h]
[nm/min]
0.25
80
0.5
70
1
50
2
30
3
20
4
10
