A-5
A TMS-A-305 Calibration Set
Measure
For measurements on the depth setting standard, proceed as follows:
8. Determine the ambient temperature as precisely as possible to prevent
the results of the calibration from being negatively influenced.
9. Define several z-ranges using the measurement sequence table and the
calibration depths from the calibration certificate for the depth setting
standard (refer to TMS software manual).
INFORMATION
Measure the reference plane and the grooves up to 50 µm in one z-range and
define a separate z-range for each of the deeper grooves (nominal depth
±10 µm).
10. Make a measurement as described in your TMS software manual.
The measurement result is shown in following figure.
Figure A.4:
Example for the measurement result
