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Outline of Maintenance
Regular check items are divided for the unit and illustrated. Make use of it for
reference.
= Check = Clean = Applying or pouring grease or (change) oil = Exchange
Ch
2) Safety area sensor rear side
1. MR unit
1) Pressure gauge
2. X-Y unit
3. Safety area sensor (General safety specification)
1) Vacuum filter
2) Nozzle holder
3) Large reflector
4. Transfer head
3) Y-axis ball screw
4) Y-axis linear bearing
6) Y-axis linear encoder
1) X-axis ball screw
2) X-axis linear bearing
5) X-axis linear encoder
1) Safety area sensor front side
2) Water receiver
493C-E-MMA01-A01-02
Ex
Cl
Gr
Ch
Ch
Gr
Gr
Gr
Gr
Gr
Gr
Ch
Ch
Cl
Cl
Cl
3) Filter element Ex
4) Nozzle chuck claw and spring Ex
493C-016TE
Содержание KXF-493C
Страница 2: ......
Страница 6: ...Page 6 493C E MMA00 B01 00 MEMO ...