Olympus USPM-RUIII Series, Руководство по эксплуатации оборудования

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8. Details of [Analyze] Menu
PV6253-F4E016 32
* If [Use the board refractive index] is currently selected, the peaks or valleys will be
selected automatically. In other cases, valleys will be selected.

[Type B]
This method calculates a film thickness from the wavelengths of the two peaks or valleys
most widely spaced within the measurement wavelength range.
* If [Use the board refractive index] is currently selected, the peaks or valleys will be
selected automatically. In other cases, peaks will be selected.

[Type C]
The method calculates a film thickness from the wavelengths of the peaks or valleys
most widely spaced within the measurement wavelengths.

[Unit]
The unit of film thickness calculation can be selected from the optical film thickness and
physical film thickness.

Measurement equations

[Type A] - [Physical film thickness]
   
d
 

  
1
2
1 2
1
2
2
1
 
 
 
n n
d
: Physical film thickness [nm]

1
: Wavelength of the detected peak or valley (Short wavelength side)

2
: Wavelength of the detected peak or valley (Long wavelength side)
 
n

: Dispersion of the refractivity wavelength of the coating material

[Type A] - [Optical film thickness]
nd
 


1
2
1 2
2 1
 
 
nd
: Optical film thickness [nd]

1
: Wavelength of the detected peak or valley (Short wavelength side)

2
: Wavelength of the detected peak or valley (Long wavelength side)