Nikon XT V 160, Руководство оператора

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Maintenance
XT V 160 X-ray System
XTM0011-F2
71
3. Once the vacuum is established and the interlocks are closed, calibrate the filament (on
page 71).
4. Re-home the manipulator before inspecting samples.
Calibrate the filament
To calibrate the filament, you must set the filament demand and align the electron beam so
that it passes exactly through the centre of the magnetic lens. Ensure that the target is not
burned. If using a static (non-rotating) target it is recommended to rotate it.
•
The filament demand controls the temperature of the filament that generates the electron
beam. The correct setting of this value will ensure that the image produced is bright and
sharp. However, take care when setting the filament demand as setting this too high will
reduce the life of the filament. Setting demand too low will give longer filament life, but
poor performance at high power.
•
The alignment of the electron beam through the magnetic lens is modified using the X-
and Y-shift controls. The X-shift controls deflect the beam in a perpendicular direction to
the Y-shift controls.
The Xi source has an auto-filament control system, which automatically conditions the
source and sets the filament demand and X-Y shifts. Inspect-X calculates the filament
demand so that it is optimised for each X-ray condition.
Ensure Safe focus is selected in the control software to prevent target
damage when a high-power X-ray source is used.
Do not change the focus mode when performing alignment.
Nikon Metrology recommend that the filament calibration is re-checked after one hour of
X-ray "on" time to achieve maximum filament lifetime. The X-ray system can be used as
normal during this 1-hour period. This is an alternative to the supplier recommendation to
heat slowly to saturation over 15–20 minutes.
Run a full filament calibration
To calibrate the new filament, use the auto-filament control system, which automatically
conditions the source and sets the filament demand and X-Y shifts. Inspect-X calculates the
filament demand so that it is optimised for each X-ray condition.
The automatic calibration waits until there is a vacuum of good enough
quality to set up the filament.
Filament calibration can only be performed when Inspect-X is in
Supervisor mode, as it requires access to the Properties window.
To calibrate the filament, follow these steps:
1. In Inspect-X, click Setup to select the Setup workflow.
2. In the Settings section, click .
3. In the Properties window, click to select the X-ray properties.