Newport XPS-D, Руководство для стартапов

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XPS-D Controller Start-Up Manual
Time Spaced
Pulses
Distance
Spaced Pulses
AquadB
Minimum pulse
width
35 ns 35 ns –
Minimum pulse
frequency
0.05 Hz
Maximum pulse
frequency
20 MHz 1.6 MHz
(5 MHz for less
than 4096
pulses)
Interpolation – x65536 AquadB encoder: x4
AnalogInterpolated
encoder: x4, x256,
x4096
Accuracy 5 ns 5 ns 5 ns
Position Window
capability
YES YES
Figure 32: Extended position compare output.
Figure 33: Output high level = 3 V minimum.
There is one PCO connector for Axis 1 and Axis 2 and another for Axis 5 and Axis 6
(PCO is not available for Axis 3, 4, 7 and 8). The signals provided on this plug depend
on the configuration of the output triggers, see Features Manual for more details.
The state of the enable signal is active when the stage is inside the programmed position
compare window. The pulse configuration can enable the pulse polarity.
The duration of the pulse is 2 µs by default and can be modified using the function
PositionerPositionComparePulseParametersSet (). Possible values for
PCOPulseWidth are: 35 ns to 327.68 µs (5 ns resolution). Successive trigger pulses
should have a minimum time lag of 625 ns (200 ns for less than 4096 pulses).
The PCO signal is SN74ABT541 line driver.
EDH0395En1031 – 09/18 44