MKS 356 Micro-Ion Plus Series, Инструкция по эксплуатации, Страница: 72 / 76

Index
72
Micro-Ion
®
Module Instruction Manual - 356007-GP
default switch to high 10
default switch to low 10
degas 10 , 34
emission current
specifications 10
filament material 12
filament mode 29
filament selection 11
internal volume 12
ON/OFF 31
sensitivity 11
x-ray limit 11
Module
attachment to vacuum chamber 16
case material 12
components 13
damage requiring service 59
location 14
non-operating temperature 12
operating conditions 12
operating environment 12
power requirements 12
power supply 18
preparing to operate 25
RS-485 status strings 48
specifications 11
weight 12
wiring connectors 12
O
Operation
calibrate at atmosphere 35
calibrate at vacuum 36
data timing and response 42
degas Micro-Ion gauge 34
error responses 57
keyboard lock 55
keyboard unlock 56
keyboard unlock status 49
Micro-Ion gauge ON/OFF 31
preparing for 25
read firmware version 48
read module status RS-485 strings 48
read vacuum pressure 32
reset to power-up state 54
RS-485 command set 45
RS-485 command structure 44
RS-485 physical layer 40
set address offset 41
set baud rate 42
set filament mode 29
set parity 42
set pressure unit 54
toggle locked functions 54
trip point relays 36
unlock interface functions 55
Outputs and indicators 11
P
Physical characteristics 12
Power supply 18
Power-up state 54
Preparing to operate module 25
Pressure measurement range 10
Pressure relief devices 14
R
Radio frequency interference (RFI) 23
Reading analog output 33
Reading and following instructions 9
Reading vacuum pressure 32
Replacing gauge assembly 66
Returning a damaged module 66
RS-485 command set 45
RS-485 commands 54
DG 34
FAC 56
IG 31
KBL 55
KBS 49
PC 36
RD 32
RS 48
RST 54
SA 41
SB 42
SF 29
SP 42
TLU 54
TS 35