MKS 356 Micro-Ion Plus Series, Инструкция по эксплуатации, Страница: 32 / 76

Chapter 3
32
Micro-Ion
®
Module Instruction Manual - 356007-GP
3.6 Read Vacuum Pressure
The optional numerical display is a 7-segment, green LED display. See
Figure 3-5. The display shows 2 significant digits, 1-digit exponent, and a
± sign for the exponent, allowing for an XX±Y display.
The displayed pressure range is 0.1x10
–9
to atmosphere (“At”) as measured
by the Conductron sensor and Micro-Ion gauge.
If the display reads “At+,” pressure is higher than 760 Torr (1000 mbar,
1.00 x 10
5
pascal), and calibration at atmosphere is required. See Calibrate
the Module at Atmosphere on page 35.
Figure 3-5 Optional Numeric Display
Pressure values in the 10
–10
range (such as 6 x 10
–10
) will be displayed as
“0.6–9”. The resolution of the numeric display changes over the operating
range of the module. See Table 3-4.
Pressure will be displayed in units of Torr, mbar or pascal, as selected. The
unit of measure is illuminated on the display panel. The units indicator is
always ON when the module is powered.
• Micro-Ion gauge is OFF, both filaments are open
• Conductron sensor failure
• Micro-Ion gauge will not turn ON Solid red
• Micro-Ion gauge is OFF, primary filament failure
• if operating in manual filament mode, press gauge button to turn Micro-Ion gauge ON Blinking red
Table 3-3 Micro-Ion Gauge Status LED
Gauge Status LED State
Two significant
digits
+ or – sign
for exponent
Exponent
Pressure units indicator