MKS 356 Micro-Ion Plus Series, Инструкция по эксплуатации, Страница: 9 / 76

Introduction
Micro-Ion
®
Module Instruction Manual - 356007-GP
9
In
stallation
O
per
a
tion
Maintenance
Intr
oduction
1.5 Operation
It is the installer's responsibility to ensure that the automatic signals
provided by the process control module are always used in a safe manner.
Carefully check manual operation of the system and the setpoint
programming before switching to automatic operation. Where an
equipment malfunction could cause a hazardous situation, always provide
for fail-safe operation. As an example, in an automatic backfill operation
where a malfunction might cause high internal pressures, provide an
appropriate pressure relief device.
1.6 Reading and Following
Instructions
You must comply with all instructions while you are installing, operating,
or maintaining the module. Failure to comply with the instructions violates
standards of design, manufacture, and intended use of the module. MKS
Instruments, Inc. disclaims all liability for the customer's failure to comply
with the instructions.
• Read instructions – Read all instructions before installing or operating the
product.
• Retain instructions – Retain the instructions for future reference.
• Follow instructions – Follow all installation, operating and maintenance
instructions.
• Heed warnings and cautions – Adhere to all warnings and caution
statements on the product and in these instructions.
• Parts and accessories – Install only those replacement parts and
accessories that are recommended by Granville-Phillips. Substitution of
parts is hazardous.
1.7 Customer Service
If the product must be returned to the factory for service, request a Return
Material Authorization (RMA) from MKS, which can be completed at
https://www.mksinst.com/service/servicehome.aspx . Do not return
products without first obtaining an RMA. In most cases a hazardous
materials disclosure form is required. The MKS Customer Service
Representative will advise you if the hazardous materials document is
required.
When returning products to MKS, be sure to package the products to
prevent shipping damage. Shipping damage on returned products as a result
of inadequate packaging is the Buyer's responsibility.
For Customer Service / Technical Support:
MKS Pressure and Vacuum Measurement Solutions
MKS Instruments, Inc.
6450 Dry Creek Parkway
Longmont, Colorado 80503 USA
Tel: 303-652-4400
Fax: 303-652-2844
Email: mks@mksinst.com